• Otakaari 7 B

1993 …2020

Research output per year

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Personal profile

Education/Academic qualification

Doctor of Science (Technology)

Master of Science (Technology)

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Research Output

Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces

Österlund, E., Suihkonen, S., Ross, G., Torkkeli, A., Kuisma, H. & Paulasto-Kröckel, M., 1 Feb 2020, In : Journal of Crystal Growth. 531, 125345.

Research output: Contribution to journalArticleScientificpeer-review

  • Atomic layer deposition of piezoelectric aluminum nitride thin films

    Österlund, E., Seppänen, H. & Paulasto-Kröckel, M., 16 Jul 2019.

    Research output: Contribution to conferencePosterScientific

    In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2 , H2 and vacuum atmospheres

    Broas, M., Lemettinen, J., Sajavaara, T., Tilli, M., Vuorinen, V., Suihkonen, S. & Paulasto-Kröckel, M., 31 Jul 2019, In : Thin Solid Films. 682, p. 147-155 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • Mechanical properties and reliability of aluminum nitride thin films

    Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • 4 Citations (Scopus)

    The Role of Ultrafine Crystalline Behavior and Trace Impurities in Copper on Intermetallic Void Formation

    Ross, G., Malmberg, P., Vuorinen, V. & Paulasto-Kröckel, M., 2019, In : ACS Applied Electronic Materials. 1, 1, p. 88-95 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • Projects

    iRel40: Intelligent Reliability 4.0

    Paulasto-Kröckel, M.

    01/05/202031/10/2023

    Project: EU other competitive funding (ERA-NET, EURAMET, EUREKA, EU JU)

    APPLAUSE: Advanced packaging for photonics, optics and electronics for low cost manufacturing in Europe

    Paulasto-Kröckel, M., Hotchkiss, J. & Vuorinen, V.

    01/05/201931/10/2022

    Project: Business Finland: Other research funding

    Beyond SOI: Silicon microfabrication platform development for next generation products

    Paulasto-Kröckel, M., Kaaos, J., Bespalova, K., Emadi, F. & Ross, G.

    01/05/201931/12/2021

    Project: Business Finland: Other research funding

    NewControl: Integrated, Fail- Operational, Cognitive Perception and Control Systems for Highly Automated Vehicles

    Paulasto-Kröckel, M., Ross, G., Kaaos, J. & Haavisto, J.

    01/05/201931/10/2022

    Project: Business Finland: Other research funding

    Prizes

    Best paper award

    Mervi Paulasto-Kröckel (Recipient) & Torsten Hauck (Recipient), Oct 2000

    Prize: Award or honor granted for a specific work

    Activities

    Low Temperature Wafer-Level Cu-In-Sn Solid Liquid Interdiffusion Bonding For Low Stress Applications

    Glenn Ross (Speaker), Vesa Vuorinen (Contributor), Joseph Hotchkiss (Contributor), Jani Kaaos (Contributor), Mervi Paulasto-Kröckel (Contributor)
    3 Dec 2019

    Activity: Talk or presentation typesConference presentation

    High-Resolution inspection for bonding voids in Solid-Liquid-Interdiffusion (SLID) bond interfaces by Acoustic GHz-Microscopy

    Sebastian Brand (Speaker), Michael Kögel (Contributor), Glenn Ross (Contributor), Vesa Vuorinen (Contributor), Mervi Paulasto-Kröckel (Contributor), Matthias Petzold (Contributor)
    27 Nov 201729 Nov 2017

    Activity: Talk or presentation typesConference presentation

    Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma as co-reactant

    Ville Rontu (Speaker), Perttu Sippola (Speaker), Mikael Broas (Speaker), Timo Sajavaara (Speaker), Mervi Paulasto-Kröckel (Speaker), Harri Lipsanen (Speaker), Sami Franssila (Speaker)
    15 Jul 201718 Jul 2017

    Activity: Talk or presentation typesConference presentation

    Keynote talk, at Micro/Nano-Electronics Packaging & Assembly, Design and Manufacturing Forum

    Mervi Paulasto-Kröckel (Keynote speaker)
    May 2017

    Activity: Talk or presentation typesKeynote or plenary lecture

    European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

    Mervi Paulasto-Kröckel (Chair)
    2016

    Activity: Participating in or organising an event typesChair of conference, workshop, panel, session or tutorial