Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
Education/Academic qualification
Doctoral degree, Engineering and Technology, Helsinki University of Technology
Award Date: 22 Nov 2004
Master's degree, Engineering and Technology, Helsinki University of Technology
Award Date: 5 May 1998
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Dive into the research topics where Marko Yli-Koski is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium
Liu, H., Pasanen, T., Leiviskä, O., Isometsä, J., Fung, J., Yli-Koski, M., Miettinen, M., Laukkanen, P. J., Vähänissi, V. & Savin, H., 2023.Research output: Contribution to conference › Poster › Scientific › peer-review
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Chemical Excitation of Silicon Photoconductors by Metal-Assisted Chemical Etching
Li, S., Ayedh, H. M., Yli-Koski, M., Vähänissi, V., Savin, H. & Oksanen, J., 2 Mar 2023, In: Journal of Physical Chemistry C. 127, 8, p. 4072–4078 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile1 Citation (Scopus)17 Downloads (Pure) -
METHOD OF DECREASING AN EXCESS CARRIER INDUCED DEGRADATION IN A SILICON SUBSTRATE
Savin, H., Haarahiltunen, A. & Yli-Koski, M., 7 Jul 2023, Patent No. EP 2761666 B1Research output: Patent
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Plasma-enhanced atomic layer deposited SiO2 enables positive thin film charge and surface recombination velocity of 1.3 cm/s on germanium
Liu, H., Pasanen, T., Leiviskä, O., Isometsä, J., Fung, J., Yli-Koski, M., Miettinen, M., Laukkanen, P., Vähänissi, V. & Savin, H., 9 May 2023, In: Applied Physics Letters. 122, 19, 191602.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile1 Citation (Scopus)21 Downloads (Pure) -
(poster) Reduction of defect density at Ge/Al2O3 interface using GeO2 interfacial layers
Isometsä, J., Fung, J., Pasanen, T., Liu, H., Leiviskä, O., Yli-Koski, M., Vähänissi, V. & Savin, H., 2022.Research output: Contribution to conference › Abstract › Scientific › peer-review
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COLO: Elimination of contact losses in semiconductors through atomic-scale interface research and engineering
Savin, H., Isometsä, J., Yli-Koski, M., Suihkonen, S., Vähänissi, V. & Chen, K.
01/09/2021 → 31/08/2025
Project: Academy of Finland: Other research funding
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FemtoBlack: Femtosecond laser sulfur hyperdoped black silicon for infrared photonic applications
Savin, H., Yli-Koski, M., Liu, X., Setälä, O. & Radfar, B.
01/03/2020 → 28/02/2024
Project: Business Finland: Strategic centres for science, technology and innovation (SHOK)
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HYMET: Hybrid metrology for thin films in energy applications
Savin, H., Rauha, I., Modanese, C. & Yli-Koski, M.
01/06/2017 → 30/11/2020
Project: EU other competitive funding (ERA-NET, EURAMET, EUREKA, EU JU)
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VISION: Superior x-ray imaging using next-generation photosensor (VISION)
Savin, H., Modanese, C., Heinonen, J., Pasanen, T., Mack, I., Vahlman, H., Vähänissi, V., Hietanen, I. & Yli-Koski, M.
01/10/2016 → 30/09/2018
Project: Academy of Finland: Other research funding
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Aalto-HIP-TUTL- Black Photodiodes
Savin, H., Heinonen, J., Elomaa, S., Laine, H., Pasanen, T., Repo-Rontu, P., Vahlman, H., Modanese, C. & Yli-Koski, M.
01/07/2016 → 30/09/2017
Project: Business Finland: New business from research ideas (TUTLI)
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Controlling SiO2 thin film charge and interface defect density on germanium
Hanchen Liu (Speaker), Toni Pasanen (Contributor), Oskari Leiviskä (Contributor), Joonas Isometsä (Contributor), John Fung (Contributor), Marko Yli-Koski (Contributor), Mikko Miettinen (Contributor), Pekka Laukkanen (Contributor), Ville Vähänissi (Contributor) & Hele Savin (Contributor)
8 Sept 2023Activity: Talk or presentation types › Conference presentation
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Impact of Copper on Light-Induced Degradation in Czochralski-Silicon PERC Solar Cells
Chiara Modanese (Speaker), Matthias Wagner (Contributor), Franziska Wolny (Contributor), Alexander Oehlke (Contributor), Hannu Laine (Contributor), Alessandro Inglese (Contributor), Henri Vahlman (Contributor), Marko Yli-Koski (Contributor) & Hele Savin (Contributor)
18 Mar 2018 → 21 Mar 2018Activity: Talk or presentation types › Conference presentation
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Increasing yield of cast-silicon ingots via Tabula Rasa anneal
Hannu Laine (Speaker), Ville Vähänissi (Contributor), Zhengjun Liu (Contributor), Toni Pasanen (Contributor), Antti Haarahiltunen (Contributor), Marko Yli-Koski (Contributor) & Hele Savin (Contributor)
4 Apr 2017Activity: Talk or presentation types › Conference presentation
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Modeling the size distribution of iron precipitates in phosphorus-implanted emitters
Hannu Laine (Contributor), Ville Vähänissi (Contributor), Marko Yli-Koski (Contributor), Zhengjun Liu (Contributor) & Hele Savin (Contributor)
2014 → …Activity: Talk or presentation types › Conference presentation
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Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements
Antti Haarahiltunen (Speaker), Hele Savin (Contributor), Marko Yli-Koski (Contributor) & Juha Sinkkonen (Contributor)
2004Activity: Talk or presentation types › Conference presentation