Research output per year
Research output per year
Search results
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2020
Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration
Bespalova, K., Ross, G., Paulasto-Kröckel, M., Thanniyil, A. S., Karuthedath, C., Mertin, S. & Pensala, T., 7 Sept 2020, Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020. IEEE, 4 p. 9251496. (IEEE International Ultrasonics Symposium).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus)