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• JVST A Best ALD Paper Award

  Österlund, E. (Recipient), Seppänen, H. (Recipient), Bespalova, K. (Recipient), Miikkulainen, K. (Recipient) & Paulasto-Kröckel, M. (Recipient), 28 Jun 2021

  Prize: Award or honor granted for a specific work

  • Paper 100%
  • Atomic Layer 50%
  • High Quality 50%
  • Atomic Layer Deposition 50%
  • Side Wall 50%