Engineering & Materials Science
Aluminum nitride
100%
Gallium phosphide
71%
Annealing
59%
MEMS
57%
Atomic layer deposition
54%
Crystal structure
45%
Nanowires
44%
Multilayers
34%
Transducers
33%
Fabrication
31%
Electrodes
31%
Gyroscopes
30%
Ultrasonics
30%
Elastic moduli
30%
Crystals
25%
Sensors
13%
Computer simulation
11%
Thin films
11%
Substrates
11%
Impurities
9%
Scandium
9%
Piezoelectric materials
9%
Phase stability
8%
Piezoelectricity
8%
Crystal orientation
7%
Fourier transform infrared spectroscopy
6%
Thermodynamic stability
6%
Film thickness
5%
Diffraction
5%
Transmission electron microscopy
5%
Crystal defects
5%
Physics & Astronomy
aluminum nitrides
40%
annealing
37%
atomic layer epitaxy
37%
deflection
31%
transducers
29%
ultrasonics
26%
electrodes
25%
microelectromechanical systems
19%
membranes
19%
crystals
12%
actuation
10%
temperature
10%
electrode materials
10%
replicas
9%
laminates
8%
impurities
6%
fabrication
5%
Chemical Compounds
Aluminium Nitride
96%
Young's Modulus
37%
Nanowire
30%
Annealing
28%
Liquid Film
22%
Crystal Structure
17%
Surface
12%
Simulation
11%
Piezoelectricity
6%
Diffraction Method
6%
Deposition Process
5%