Material Science
Piezoelectricity
100%
Aluminum Nitride
87%
Microelectromechanical System
70%
Electrode
56%
Multilayers
44%
Transducer
44%
Surface
39%
Temperature
28%
Material
23%
Devices
22%
Crystal Structure
22%
Young's Modulus
22%
Characterization
22%
Gallium
22%
Nanowires
22%
Actuator
22%
Chemical Vapor Deposition
22%
Thin Films
19%
Membrane
13%
Crystal
12%
Annealing
10%
Crystalline Material
9%
Laminate
8%
Vapor
6%
Metal
6%
Scanning Electron Microscopy
5%
Titanium
5%
Nitride Compound
5%
Engineering
Piezoelectric
57%
Side Wall
46%
Aluminum
37%
Microelectromechanical System
37%
Actuation
23%
Surfaces
22%
Atomic Layer Deposition
22%
High Quality
22%
Atomic Layer
22%
High Degree
22%
Development
22%
Crystal Quality
18%
Finite Element Modeling
11%
Elements
10%
Piezoelectric Material
7%
Simulation
7%
Coverage
7%
Thin Films
6%