Research output per year
Research output per year
Personal profile
Education/Academic qualification
Master's degree, Engineering and Technology, LUT University
Award Date: 29 Jun 2018
Keywords
- piezoelectric
- MEMS
- Thin film technology
- Thin films
- aluminum nitride
- AlN
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Dive into the research topics where Kristina Bespalova is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing
Bespalova, K., 2024, Aalto University. 142 p.Research output: Thesis › Doctoral Thesis › Collection of Articles
Open Access -
Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication
Bespalova, K., Ross, G., Suihkonen, S. & Paulasto-Kröckel, M., Apr 2024, In: Advanced Electronic Materials. 10, 4, 8 p., 2300628.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile3 Citations (Scopus)64 Downloads (Pure) -
In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS
Bespalova, K., Nieminen, T., Gabrelian, A., Ross, G. & Paulasto-Kröckel, M., Aug 2023, In: Advanced Electronic Materials. 9, 8, 11 p., 2300015.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile5 Citations (Scopus)91 Downloads (Pure) -
Unlocking the Potential of Piezoelectric Films Grown on Vertical Surfaces for Inertial MEMS
Gabrelian, G., Ross, G., Bespalova, K. & Paulasto-Kröckel, M., Dec 2022, In: Materials Today Communications. 33, 10 p., 104522.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile146 Downloads (Pure) -
Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls
Österlund, E., Seppänen, H., Bespalova, K., Miikkulainen, V. & Paulasto-Kröckel, M., 1 May 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 3, 12 p., 032403.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile18 Citations (Scopus)278 Downloads (Pure)
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3DPiezoMems R2B: Aalto-R2B-3DPiezoMems
Paulasto-Kröckel, M. (Principal investigator), Nieminen, T. (Project Member), Bespalova, K. (Project Member), Suihkonen, S. (Project Member), Hallanoro, P. (Project Member), Matondang, J. S. (Project Member), Ali, A. (Project Member), Gabrelian, G. (Project Member) & Ross, G. (Project Member)
01/01/2023 → 31/12/2024
Project: Business Finland: New business from research ideas (TUTLI)
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-: Integrated Fail-Operational, Adaptive Perception and Control Systems for Highly Automated Vehicles
Paulasto-Kröckel, M. (Principal investigator), Gabrelian, G. (Project Member), Ross, G. (Project Member), Kaaos, J. (Project Member), Bespalova, K. (Project Member), Nieminen, T. (Project Member) & Rathore, J. (Project Member)
01/05/2019 → 31/03/2023
Project: Business Finland: Other research funding
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Beyond SOI: Silicon microfabrication platform development for next generation products
Paulasto-Kröckel, M. (Principal investigator), Emadi, F. (Project Member), Bespalova, K. (Project Member), Kaaos, J. (Project Member) & Ross, G. (Project Member)
01/05/2019 → 31/12/2021
Project: Business Finland: Other research funding
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POSITION-II: A pilot line for the next generation of smart catheters and implants
Paulasto-Kröckel, M. (Principal investigator), Österlund, E. (Project Member), Bespalova, K. (Project Member), Dong, H. (Project Member), Vuorinen, V. (Project Member) & Kaaos, J. (Project Member)
01/06/2018 → 31/05/2021
Project: Business Finland: Other research funding
Prizes
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JVST A Best ALD Paper Award
Österlund, E. (Recipient), Seppänen, H. (Recipient), Bespalova, K. (Recipient), Miikkulainen, K. (Recipient) & Paulasto-Kröckel, M. (Recipient), 28 Jun 2021
Prize: Award or honor granted for a specific work