20122020

Research output per year

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Personal profile

Keywords

  • Atomic layer deposition
  • 3D printing
  • Nanotechnology
  • Cleanroom processing
  • Photovoltaics
  • Materials science
  • Applied Physics
  • Spatial ALD
  • Thin film technology

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Research Output

  • 10 Article
  • 2 Conference contribution
  • 2 Conference article
  • 1 Poster

AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure

Heikkinen, I. T. S., Koutsourakis, G., Virtanen, S., Yli-Koski, M., Wood, S., Vähänissi, V., Salmi, E., Castro, F. A. & Savin, H., Mar 2020, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 38, 2, 022401.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
  • 42 Downloads (Pure)

    Atomic layer deposited aluminium oxide mitigates outgassing from fused filament fabrication–based 3-D printed components

    Heikkinen, I. T. S., Marin, G., Bihari, N., Ekstrum, C., Mayville, P. J., Fei, Y., Hu, Y. H., Karppinen, M., Savin, H. & Pearce, J. M., Feb 2020, In : Surface and Coatings Technology. 386, 24 p., 125459.

    Research output: Contribution to journalArticleScientificpeer-review

  • Towards national policy for open source hardware research: The case of Finland

    Heikkinen, I., Savin, H., Partanen, J., Seppälä, J. & Pearce, J. M., Jun 2020, In : Technological Forecasting and Social Change. 155, 119986.

    Research output: Contribution to journalArticleScientificpeer-review

  • 1 Citation (Scopus)

    Vacuum Outgassing Characteristics of Unpigmented 3-D Printed Polymers Coated with ALD Alumina

    Bihari, N., Heikkinen, I. T. S., Marin, G., Ekstrum, C., Mayville, P. J., Oberloier, S., Savin, H., Karppinen, M. & Pearce, J., 2020, (Accepted/In press) In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 3 Downloads (Pure)

    Compatibility of 3-D Printed Devices in Cleanroom Environments for Semiconductor Processing

    Pasanen, T. P., von Gastrow, G., Heikkinen, I. T. S., Vähänissi, V., Savin, H. & Pearce, J., 1 Jan 2019, In : MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. 89, p. 59-67 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • 4 Citations (Scopus)

    Projects

    Hybrid metrology for thin films in energy applications

    Savin, H., Modanese, C., Heikkinen, I. & Yli-Koski, M.

    01/06/201731/05/2021

    Project: EU: Other research funding

    Black silicon and defect engineering for highly efficient solar cells and modules, BLACK

    Savin, H., Laine, H., Yli-Koski, M., Vähänissi, V., Liu, Z., Haarahiltunen, A., Modanese, C., Pasanen, T., Heikkinen, I. & von Gastrow, G.

    01/03/201531/08/2018

    Project: Business Finland: Other research funding

    Riddle of light induced degradation in silicon photovoltaics

    Savin, H., Yli-Koski, M., Vähänissi, V., Laine, H., Huang, H., Inglese, A., Modanese, C., Heikkinen, I., Vahlman, H., Nampalli, N. & von Gastrow, G.

    01/12/201231/05/2018

    Project: EU: ERC grants

    Activities

    • 2 Reviewer of scientific journal
    • 2 Conference presentation
    • 1 Public or invited talk

    Solar Energy (Journal)

    Ismo Heikkinen (Reviewer)
    2020

    Activity: Publication peer-review and editorial work typesReviewer of scientific journal

    JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (Journal)

    Ismo Heikkinen (Reviewer)
    2019

    Activity: Publication peer-review and editorial work typesReviewer of scientific journal

    Elimination of light-induced degradation by black silicon

    Toni P. Pasanen (Speaker), Chiara Modanese (Contributor), Ville Vähänissi (Contributor), Hannu Laine (Contributor), Franziska Wolny (Contributor), Alexander Oehlke (Contributor), Christian Kusterer (Contributor), Ismo T. S. Heikkinen (Contributor), Matthias Wagner (Contributor), Hele Savin (Contributor)
    25 Sep 2018

    Activity: Talk or presentation typesConference presentation

    Elimination of light-induced degradation by black silicon

    Toni Pasanen (Invited speaker), Chiara Modanese (Contributor), Ville Vähänissi (Contributor), Hannu Laine (Contributor), Franziska Wolny (Contributor), Alexander Oehlke (Contributor), Ismo T. S. Heikkinen (Contributor), Matthias Wagner (Contributor), Hele Savin (Contributor)
    10 Nov 2018

    Activity: Talk or presentation typesPublic or invited talk

    Efficient Surface Passivation of Black Silicon Using Spatial ALD

    Ismo T.S. Heikkinen (Contributor), Päivikki Repo (Contributor), Ville Vähänissi (Contributor), Toni Pasanen (Contributor), Ville Malinen (Contributor), Emma Salmi (Speaker), Hele Savin (Contributor)
    17 Jul 2017

    Activity: Talk or presentation typesConference presentation