Research output per year
Research output per year
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Dive into the research topics where Heli Seppänen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Plasma-enhanced atomic layer deposition of aluminum nitride : characteristics and applications
Seppänen, H., 2024, Aalto University. 114 p.Research output: Thesis › Doctoral Thesis › Collection of Articles
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Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
Seppanen, H., Prozheev, I., Kauppinen, C., Suihkonen, S., Mizohata, K. & Lipsanen, H., Sept 2023, In: Journal of Vacuum Science and Technology A. 41, 5, 7 p., 052401.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile5 Citations (Scopus)90 Downloads (Pure) -
Effects of atomic layer deposition on the optical properties of two-dimensional transition metal dichalcogenide monolayers
Turunen, M., Fernandez Pizarro, H., Akkanen, S.-T., Seppänen, H. & Sun, Z., Oct 2023, In: 2D Materials. 10, 4, 9 p., 045018.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile3 Citations (Scopus)56 Downloads (Pure) -
Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics
Liapis, A. C., Pelgrin, V., Liu, P., Cui, X., Rosa, J. M. A., Seppannen, H., Li, D., Reduto, I., Honkanen, S., Lipsanen, H. & Sun, Z., 2023.Research output: Contribution to conference › Abstract › Scientific › peer-review
1 Citation (Scopus) -
Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls
Österlund, E., Seppänen, H., Bespalova, K., Miikkulainen, V. & Paulasto-Kröckel, M., 1 May 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 3, 12 p., 032403.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile22 Citations (Scopus)436 Downloads (Pure)
Projects
- 7 Finished
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MATINE AEROGEELI: Uudet aerogeelipohjaiset tutkahäivemateriaalit
Lipsanen, H. (Principal investigator), Radwan, M. (Project Member), Kuittinen, O. (Project Member), Seppänen, H. (Project Member), Khalid, F. (Project Member) & Raju, R. (Project Member)
01/02/2022 → 31/12/2022
Project: Other Domestic (20 FC)
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ALDEL: Atomic-layer-deposited erbium-lasers for high-speed data centers
Sun, Z. (Principal investigator), Cui, X. (Project Member), Seppänen, H. (Project Member), Liu, P. (Project Member), Pelgrin, V. (Project Member), Rajamanickam, R. (Project Member), Atalaia Rosa, J. (Project Member), Pakarinen, L. (Project Member), Rönn, J.-O. (Project Member), Nigmatulin, F. (Project Member) & Liapis, A. (Project Member)
01/01/2021 → 30/06/2022
Project: BF R2B
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GreEnergy: Wideband optical antennae for use in energy harvesting applications
Lipsanen, H. (Principal investigator), Sharmin, S. (Project Member), Mustonen, P. (Project Member), Seppänen, H. (Project Member), Khalid, F. (Project Member), Holmi, J. (Project Member), Khayrudinov, V. (Project Member), Mehmood, N. (Project Member), Shafi, A. (Project Member), Mäntynen, H. (Project Member), Raju, R. (Project Member) & Hyttinen, H. (Project Member)
01/01/2021 → 31/12/2024
Project: EU H2020 Framework program
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GrapheneCore3: Graphene Flagship Core Project 3
Lipsanen, H. (Principal investigator), Mustonen, P. (Project Member), Shafi, A. (Project Member), Mackenzie, D. (Project Member), Seppänen, H. (Project Member) & Holmi, J. (Project Member)
01/04/2020 → 31/03/2023
Project: EU H2020 Framework program
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2D Layered Materials for Photonics
Lipsanen, H. (Principal investigator), Mäntynen, H. (Project Member), Khayrudinov, V. (Project Member), Susoma, J. (Project Member), Mustonen, P. (Project Member), Junaid, M. (Project Member), Qureshi, M. (Project Member), Seppänen, H. (Project Member), Höglund, S. (Project Member), Mackenzie, D. (Project Member), Holmi, J. (Project Member) & Isakov, K. (Project Member)
01/09/2016 → 31/08/2020
Project: Academy of Finland: Other research funding
Prizes
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JVST A Best ALD Paper Award
Österlund, E. (Recipient), Seppänen, H. (Recipient), Bespalova, K. (Recipient), Miikkulainen, K. (Recipient) & Paulasto-Kröckel, M. (Recipient), 28 Jun 2021
Prize: Award or honor granted for a specific work
Activities
- 1 Conference presentation
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Passivation of detector-grade Fz-Si with atomic layer deposited aluminium oxide
Pasanen, T. (Speaker), Ott, J. (Contributor), Repo, P. (Contributor), Seppänen, H. (Contributor), Vähänissi, V. (Contributor) & Savin, H. (Contributor)
23 Sept 2019Activity: Talk or presentation types › Conference presentation