Research output

Research output per year 2014 2017 2018 2020 2021 2022 2023

• 20 Article
• 8 Conference contribution
• 1 Chapter
• 1 Poster
• 2 More
  • 1 Letter
  • 1 Doctoral Thesis

Research output per year

Research output per year

Search results

• 2020

  Where is silicon based MEMS heading to?

  Paulasto-Kröckel, M., Tilli, M., Ross, G. & Kuisma, H., 2020, Handbook of Silicon Based MEMS Materials and Technologies (Third Edition): Micro and Nano Technologies. Elsevier, p. xxi-xxix 9 p.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific