Research output per year
Research output per year
Search results
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2023
Computational fluid dynamics study of the atomic layer deposition process around cylindrical and planar configurations
Ersavas Isitman, G., Izbassarov, D., Puurunen, R. L. & Vuorinen, V., 5 Aug 2023, In: Chemical Engineering Science. 277, 118862.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2022
Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics
Velasco Calsina, J., Gonsalves, C., Ersavas Isitman, G., Yim, J., Verkama, E., Izbassarov, D., Vuorinen, V. & Puurunen, R., 2022.Research output: Contribution to conference › Poster › Scientific