Uusi-Esko, K., Rautama, E.-L., Sajavaara, T., Pihlatie, M. & Karppinen, M., 2010, 10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etelä-Korea, 20.-23.6.2010.
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review