Research output per year
Research output per year
Network
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
Research output
- 2 Poster
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Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics
Velasco Calsina, J., Gonsalves, C., Ersavas Isitman, G., Yim, J., Verkama, E., Izbassarov, D., Vuorinen, V. & Puurunen, R., 2022.Research output: Contribution to conference › Poster › Scientific
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Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model
Velasco, J. A., Järvilehto, J., Yim, J., Gonsalves, C., Verkama, E. & Puurunen, R. L., 2022.Research output: Contribution to conference › Poster › Scientific › peer-review
Projects
- 1 Active
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Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R., Järvilehto, J., Revitzer, H., Viinikainen, T., Miikkulainen, V., Yim, J., Gonsalves, C. & Velasco Calsina, J.
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding