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  • 2010

    Low-temperature processes for MEMS device fabrication

    Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. p. 167-178 12 p. (NATO Science for Peace and Security Series B: Physics and Biophysics).

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    6 Citations (Scopus)
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