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  • Phone+358 40 8201972
20102020

Research activity per year

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Search results

  • Chapter

    Low-temperature processes for MEMS device fabrication

    Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. p. 167-178 12 p. (NATO Science for Peace and Security Series B: Physics and Biophysics).

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    6 Citations (Scopus)
  • Conference contribution

    Use of ALD thin film bragg mirror stacks in tuneable visible light mems fabry-perot interferometers

    Rissanen, A. & Puurunen, R. L., 2012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V. Vol. 8249. 82491A

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    11 Citations (Scopus)
  • Vapor-phase self-assembled monolayers for improved MEMS reliability

    Rissanen, A., Tappura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M. & Leskelä, M., 2010, IEEE Sensors 2010 Conference, SENSORS 2010. p. 767-770 4 p. 5690769

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    6 Citations (Scopus)
  • Doctoral Thesis

    Microsystems for biological cell characterization

    Rissanen, A., 2012, VTT. 130 p.

    Research output: ThesisDoctoral ThesisMonograph

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