• Tietotie 3, 02150 Espoo


Research output per year

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Personal profile

Education/Academic qualification

Doctor of Science (Technology), Electrical Engineering

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Research Output

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Sippola, P., Pyymaki Perros, A., Ylivaara, O. M. E., Ronkainen, H., Julin, J., Liu, X., Sajavaara, T., Etula, J., Lipsanen, H. & Puurunen, R. L., 1 Sep 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 5, 051508.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
  • 1 Citation (Scopus)
    84 Downloads (Pure)

    Wide-Band Black Silicon with Atomic Layer Deposited NbN

    Isakov, K., Pyymaki Perros, A., Shah, A. & Lipsanen, H., 11 Jun 2018, In : Nanotechnology. 29, 33, 335303.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
  • 69 Downloads (Pure)

    Low temperature and high quality atomic layer deposition HfO2 coatings

    Perros, A. P., Sippola, P., Arduca, E., Johansson, L. S. & Lipsanen, H., 26 Jul 2017, 2017 IMAPS Nordic Conference on Microelectronics Packaging, NordPac 2017. IEEE, p. 182-185 4 p. 7993189

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  • Surface Passivation Properties of HfO2 Thin Film on n-Type Crystalline Si

    Cheng, X., Repo, P., Haug, H., Perros, A. P., Marstein, E. S., Di Sabatino, M. & Savin, H., 1 Mar 2017, In : IEEE Journal of Photovoltaics. 7, 2, p. 479-485 7 p., 7812606.

    Research output: Contribution to journalArticleScientificpeer-review

  • 9 Citations (Scopus)

    Atomic layer deposition of highly doped Er:Al2O3 and Tm:Al2O3 for silicon-based waveguide amplifiers

    Rönn, J., Karvonen, L., Pyymaki-Perros, A., Peyghambarian, N. N., Lipsanen, H., Säynätjoki, A. & Sun, Z., 2016, p. 98910Y. 1 p.

    Research output: Contribution to conferencePaperScientific



    Pyymaki Perros, A., Rajamanickam, R., Sun, Z., Hedberg, D., Lau Kuen Yao, L., Kim, M., Dai, Y. & Du, M.


    Project: Business Finland: New business from research ideas (TUTLI)