Research Output

2000

Loading effects in deep silicon etching

Karttunen, J., Kiihamäki, J. & Franssila, S., 2000, SPIE. p. 90-97

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Submicron image reversal by liquid phase deposition of oxide

Niskanen, A. J. & Franssila, S., 2000, p. s. TR-9P, (Micro and Nanoengineering (MNE 2000), Jena, Germany, Sept. 2000).

Research output: Working paperProfessional

1999

Deep silicon etching in inductively coupled plasma reactor for MEMS

Kiihamäki, J. & Franssila, S., 1999, In : Physica Scripta. T79, T79, p. 250-254

Research output: Contribution to journalArticleScientificpeer-review

Pattern shape effects and artefacts in deep silicon etching

Kiihamäki, J. & Franssila, S., 1999, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. A17, 4, p. 2280-2285

Research output: Contribution to journalArticleScientificpeer-review

79 Citations (Scopus)
1998

Valtaavatko mikropiirit elektroniikan?

Franssila, S., 1998, In : Tiede 2000. 1

Research output: Contribution to journalArticleProfessional

1997

Reduction of molybdenum resistivity by a seed layer of Ti-W

Franssila, S., Kattelus, H. & Nykänen, E., 1997, In : Microelectronic Engineering. 37/38, p. 373-380

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
1996

Hospital mouth cleaning aids may cause dental erosion

Meuman, J. H., Sorva, R., Pelttari, A., Rytömaa, I., Franssila, S. & Kroon, L., 1996, In : SPECIAL CARE IN DENTISTRY. 16, 6

Research output: Contribution to journalArticleScientificpeer-review

Tekniikka kuin luonto

Franssila, S., 1996, In : Tiede 2000. 6

Research output: Contribution to journalArticleProfessional

1994

Kuinka pieneksi pii-transistori voidaan kutistaa?

Franssila, S. & Kuivalainen, P., 1994, In : Fysiikka tänään. 2

Research output: Contribution to journalArticleProfessional

Linewidth uniformity and etch rate uniformity in refractory metal plasma etching

Franssila, S., 1994, In : Journal of Vacuum Science and Technology. B12, 5

Research output: Contribution to journalArticleScientificpeer-review

1993

CHARACTERIZATION OF THE GENES OF THE 2,3-BUTANEDIOL OPERONS FROM KLEBSIELLA-TERRIGENA AND ENTEROBACTER-AEROGENES

BLOMQVIST, K., NIKKOLA, M., LEHTOVAARA, P., SUIHKO, ML., AIRAKSINEN, U., STRABY, KB., KNOWLES, JKC. & Penttilä, M., Mar 1993, In : Journal of Bacteriology. 175, 5, p. 1392-1404 13 p.

Research output: Contribution to journalArticleScientificpeer-review

1991

CHROMOSOMAL INTEGRATION AND EXPRESSION OF 2 BACTERIAL ALPHA-ACETOLACTATE DECARBOXYLASE GENES IN BREWERS-YEAST

BLOMQVIST, K., SUIHKO, ML., KNOWLES, J. & Penttilä, M., Oct 1991, In : Applied and Environmental Microbiology. 57, 10, p. 2796-2803 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

Molarius, J. M., Franssila, S., Drozdy, G. & Saarilahti, J., 1991, In : Applied Surface Science. 53

Research output: Contribution to journalArticleScientificpeer-review

1990

Mikroelektroniikan rajat ja reunaehdot

Franssila, S., 1990, In : Tekniikan Tekijät. p. 18-25

Research output: Contribution to journalArticleProfessional