Research Output

1990

Mikroelektroniikan rajat ja reunaehdot

Franssila, S., 1990, In : Tekniikan Tekijät. p. 18-25

Research output: Contribution to journalArticleProfessional

1991

CHROMOSOMAL INTEGRATION AND EXPRESSION OF 2 BACTERIAL ALPHA-ACETOLACTATE DECARBOXYLASE GENES IN BREWERS-YEAST

BLOMQVIST, K., SUIHKO, ML., KNOWLES, J. & Penttilä, M., Oct 1991, In : Applied and Environmental Microbiology. 57, 10, p. 2796-2803 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

Molarius, J. M., Franssila, S., Drozdy, G. & Saarilahti, J., 1991, In : Applied Surface Science. 53

Research output: Contribution to journalArticleScientificpeer-review

1993

CHARACTERIZATION OF THE GENES OF THE 2,3-BUTANEDIOL OPERONS FROM KLEBSIELLA-TERRIGENA AND ENTEROBACTER-AEROGENES

BLOMQVIST, K., NIKKOLA, M., LEHTOVAARA, P., SUIHKO, ML., AIRAKSINEN, U., STRABY, KB., KNOWLES, JKC. & Penttilä, M., Mar 1993, In : Journal of Bacteriology. 175, 5, p. 1392-1404 13 p.

Research output: Contribution to journalArticleScientificpeer-review

1994

Kuinka pieneksi pii-transistori voidaan kutistaa?

Franssila, S. & Kuivalainen, P., 1994, In : Fysiikka tänään. 2

Research output: Contribution to journalArticleProfessional

Linewidth uniformity and etch rate uniformity in refractory metal plasma etching

Franssila, S., 1994, In : Journal of Vacuum Science and Technology. B12, 5

Research output: Contribution to journalArticleScientificpeer-review

1996

Hospital mouth cleaning aids may cause dental erosion

Meuman, J. H., Sorva, R., Pelttari, A., Rytömaa, I., Franssila, S. & Kroon, L., 1996, In : SPECIAL CARE IN DENTISTRY. 16, 6

Research output: Contribution to journalArticleScientificpeer-review

Tekniikka kuin luonto

Franssila, S., 1996, In : Tiede 2000. 6

Research output: Contribution to journalArticleProfessional

1997

Reduction of molybdenum resistivity by a seed layer of Ti-W

Franssila, S., Kattelus, H. & Nykänen, E., 1997, In : Microelectronic Engineering. 37/38, p. 373-380

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
1998

Valtaavatko mikropiirit elektroniikan?

Franssila, S., 1998, In : Tiede 2000. 1

Research output: Contribution to journalArticleProfessional

1999

Deep silicon etching in inductively coupled plasma reactor for MEMS

Kiihamäki, J. & Franssila, S., 1999, In : Physica Scripta. T79, T79, p. 250-254

Research output: Contribution to journalArticleScientificpeer-review

Pattern shape effects and artefacts in deep silicon etching

Kiihamäki, J. & Franssila, S., 1999, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. A17, 4, p. 2280-2285

Research output: Contribution to journalArticleScientificpeer-review

79 Citations (Scopus)
2000

Deep Silicon Structures by Electrochemical Etching

Grigoras, K., Niskanen, A. J. & Franssila, S., 2000, Uppsala, Sweden, (MME 2000 Micromechanics Europe, Uppsala, Sweden, 1.-3.10.2000).

Research output: Working paperProfessional

Depth and profile control in plasma etched MEMS structures

Kiihamäki, J., Kattelus, H., Karttunen, J. & Franssila, S., 2000, In : Sensors and Actuators. 82, p. 234-238

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)

Etching through silicon wafer in inductively coupled plasma

Franssila, S., Kiihamäki, J. & Karttunen, J., 2000, In : Microsystem Technologies. 6, p. 141-144

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)

Loading effects in deep silicon etching

Karttunen, J., Kiihamäki, J. & Franssila, S., 2000, SPIE. p. 90-97

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Submicron image reversal by liquid phase deposition of oxide

Niskanen, A. J. & Franssila, S., 2000, p. s. TR-9P, (Micro and Nanoengineering (MNE 2000), Jena, Germany, Sept. 2000).

Research output: Working paperProfessional

2001

Bulk-Micromachined Silicon Microbridges for Infrared Emitters

Grigoras, K., Juvonen, T., Nera, K., Heikkilä, P. & Franssila, S., 2001, (Micromechanics Europe 2001, Cork, Ireland, September 16-18).

Research output: Working paperProfessional

Microsystems education in the Nordic region

Grey, F., Franssila, S., Furuberg, L. & Hjort, K., 2001, (7th World Micromachine Summit, Freiburg, April 30-May 2, 2001).

Research output: Working paperProfessional

Plasma etched initial pits for electrochemically etched macroporous silicon structures

Grigoras, K., Niskanen, A. & Franssila, S., 2001, In : Journal of Micromechanics and Microengineering. 11, p. 371-375

Research output: Contribution to journalArticleScientificpeer-review

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)

Tuomikoski, S., Huikko, K., Grigoras, K., Niskanen, A., Kotiaho, T., Kostiainen, R., Franssila, S. & Baumann, M., 2001, NanoTech2001, Montreux, 27-29.11.2001.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Submicron image reversal by liquid phase deposition of oxide

Niskanen, A. & Franssila, S., 2001, In : Microelectronic Engineering. 57-58, p. 629-632

Research output: Contribution to journalArticleScientificpeer-review

2002

Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes

Spehar, A-M., Vainio, P., Eskola, J., Nyman, A., Håkansson, M., Jiang, Q., Franssila, S. & Kulmala, S., 2002, (Euroanalysis 12, Dortmund, Germany, September 2002).

Research output: Working paperProfessional

Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing

Ovchinnikov, V., Sokolov, V. & Franssila, S., 2002, p. PS-I-18, (4th International Conference on Low Dimensional Structures and Devices, Fortaleza, Braxil, December 8-13, 2002).

Research output: Working paperProfessional

Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)

Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, In : Bio Forum International. 6, p. 214

Research output: Contribution to journalArticleScientificpeer-review

Microglow: a microsystems laboratory course

Franssila, S., Tittonen, I., Grigoras, K., Juvonen, T., Nera, K. & Heikkilä, P., 2002, Micro Structure Workshop 2002, Aronsborg, Bålsta. p. paper A12

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Micromechanics in silicon

Juvonen, T., Poulsen, J. & Franssila, S., 2002, Micro Structure Workshop 2002, Aronsborg, Bålsta. p. paper B5

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Microsystems and nanotechnology in the Nordic region

Franssila, S., Furuberg, L., Enoksson, P., Grey, F. & Larsen, A., 2002, Proc. 8th Worl Micromachine Summit, Maastricht, 2002.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Modified porous silicon surfaces as DIOS-MS sample plates

Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, p. 503, (MicroTAS 2002, Nara, Japan).

Research output: Working paperProfessional

Optical interferometric detection of a mechanical silicon oscillator

Nera, K., Hahtela, O., Franssila, S. & Tittonen, I., 2002, Channes, p. 430-438, (DTIP 2002 of MEMS and MOEMS, Mandelieu, France, May 5-8, 2002).

Research output: Working paperProfessional

PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

Huikko, K., Östman, P., Grigoras, K., Tuomikoski, S., Tiainen, V-M., Soininen, A., Manz, A., Franssila, S., Kostiainen, R. & Kotiaho, T., 2002, p. 506, (MicroTAS 2002, Nara, Japan).

Research output: Working paperProfessional

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)

Tuomikoski, S., Huikko, K., Grigoras, K., Östman, P., Kotiaho, T., Kostiainen, R., Baumann, M. & Franssila, S., 2002, In : Lab on a chip. 2, 4, p. 247-253

Research output: Contribution to journalArticleScientificpeer-review

Silicon devices for chemistry and lifesciences

Franssila, S., 2002, Suomen Kemian Seura, Kemian päivät 2002. p. 26-27

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, In : Bio Forum International. 2, p. 12

Research output: Contribution to journalArticleScientificpeer-review

2003

Droplet based self-assembly of SU-8 microparts

Corral, S., Zhou, Q., Albut, A., Franssila, S., Tuomikoski, S. & Koivo, H., 2003, p. 13, (MICRO Tec 2003, Münich, Germany, October 13-15 2003).

Research output: Working paperProfessional

Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs

Huikko, K., Östman, P., Sauber, C., Mandel, F., Grigoras, K., Franssila, S., Kotiaho, T. & Kostiainen, R., 2003, In : Rapid Communications in Mass Spectrometry. 17, p. 1339-1343

Research output: Contribution to journalArticleScientificpeer-review

34 Citations (Scopus)

Formation of nanoporous glass layer

Grigoras, K. & Franssila, S., 2003, (Nordic Semiconductor Meeting 2003, Tampere, Finland).

Research output: Working paperProfessional

2 Citations (Scopus)

Luminescence study of silicon nanostructures prepared by ion beam mixing

Ovchinnikov, V., Sokolov, V. & Franssila, S., 2003, In : Microelectronics Journal. 34, p. 579-581

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip

Franssila, S., Marttila, S., Östman, P., Kotiaho, T. & Kostiainen, R., 2003, (Nanotech 2003, Montreaux, France 25-27. November 2003).

Research output: Working paperProfessional

Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

Huikko, K., Östman, P., Grigoras, K., Tuomikoski, S., Tiainen, V-M., Soininen, A., Manz, A., Franssila, S., Kostiainen, R. & Kotiaho, T., 2003, In : Lab on a Chip. 3, p. 67-72

Research output: Contribution to journalArticleScientificpeer-review

Rapid thermal annealing of Cu/WNx/Si structures

Lipsanen, A., Kuivalainen, P., Rauhala, E., Franssila, S. & Seppälä, A., 2003, In : Journal of Materials Science: Materials in Electronics. 14, p. 315-318

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot

Tuomikoski, S., del Corral, C., Zhou, Q. & Franssila, S., 2003, (Micromechanics Europe, MME 3, Delft, Holland, October 2003).

Research output: Working paperProfessional

Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry

Ovchinnikov, V., Franssila, S., Jiang, H., Nasibulin, A. G. & Kauppinen, E. I., 2003, Oxford, UK, p. 25-27, (The 20th Nordic Semiconductor Meeting, Tampere, Finland, August 25-27).

Research output: Working paperProfessional

Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

Tuomikoski, S. & Franssila, S., 2003, (Nordic Semiconductor Meeting 2003, Tampere, Finland).

Research output: Working paperProfessional

22 Citations (Scopus)
2004

Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer

Kauppila, T., Östman, P., Mattila, S., Ketola, R., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, In : Analytical Chemistry. 76, p. 6797-6801

Research output: Contribution to journalArticleScientificpeer-review

44 Citations (Scopus)

Atmospheric pressure photoionization with a microchip heated nebulizer

Kauppila, T., Östman, P., Marttila, S., Ketola, R., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, In : Proceedings MicroTAS. 2, p. 422-424

Research output: Contribution to journalArticleProfessional

Atmospheric pressure photoionization with a microchip heated nebulizer

Kauppila, T., Östman, P., Marttila, S., Ketola, R., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, Cambridge, UK, p. 422-424, (8th International Conference on miniaturized sysems for chemistry and life sciences, Malmö, Sweden, 26-30. September 2004).

Research output: Working paperProfessional

DLC-PDMS-hybrid patterning and surface treatment

Laakso, T., Soininen, A. & Franssila, S., 2004, In : Proceedings MicroTAS. 2, p. 103-105

Research output: Contribution to journalArticleProfessional

DLC-PDMS-hyprid patterning and surface treatment

Laakso, T., Soininen, A. & Franssila, S., 2004, Cambrige, UK, p. 103-105, (8th International Conference on miniaturized systems for chemistry and life csiences 2004, Malmö,Sweden, 26-30. September 2004).

Research output: Working paperProfessional