School services, ELEC

Organisational unit: Department

Research outputs

  1. 2004
  2. Published

    Fabrication of porous membrane filter from p-type silicon

    Grigoras, K., Franssila, S., Sikanen, T., Kotiaho, T. & Kostiainen, R., 2004, VALENCIA, SPAIN, p. 326-327, (Porous Semiconductors - Science and Technology, Cullera-Valencia, Spain, 14-19 March 2004).

    Research output: Working paperProfessional

  3. Published

    Formation of nanoporous glass layer

    Grigoras, K. & Franssila, S., 2004, In : Physica Scripta. T114, p. 66-68

    Research output: Contribution to journalArticleScientificpeer-review

  4. Published

    Introduction to Microfabrication

    Franssila, S., 2004, Chichester, ENGLAND.

    Research output: Book/ReportBookScientificpeer-review

  5. Published

    Macropore formation in multilayer films

    Ovchinnikov, V., 2004, Italia, p. Book 2, s. 746, (16th International Vacuum Congress, Venice, Italy, 28.6.-2.7.2004).

    Research output: Working paperProfessional

  6. Published

    Microchip atmospheric pressure chemical ionisation-mass spectrometry

    Östman, P., Marttila, S., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, In : Proceedings MicroTAS. 2, p. 437-439

    Research output: Contribution to journalArticleProfessional

  7. Published

    Microchip atmospheric pressure chemical ionisation-mass spectrometry

    Östman, P., Marttila, S., Kotiaho, S., Franssila, S. & Kostiainen, R., 2004, p. 437-439, (MicroTAS 2004).

    Research output: Working paperProfessional

  8. Published

    Microfluidic Nebulizer Chip for Mass Spectrometry

    Franssila, S., Östman, P., Marttila, S., Kotiaho, T. & Kostiainen, R., 2004, MicroStructure Workshop MSW '04, Ystad, Sweden March 29-31 2004. Nilsson, J. & Laurell, T. (eds.). Lund, Sweden: Lund University in collaboration with Colibri Pro Development and Swedish Foundation for Strategic Research

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  9. Published

    Mikrokanavia biosiruihin

    Franssila, S., Kotiaho, T., Kostiainen, R., Baumann, M., Leppihalme, M., Hokkanen, A. & Grigoras, K., 2004, In : Prosessori. 11

    Research output: Contribution to journalArticleProfessional

  10. Published

    Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty

    Östman, P., Marttila, S. J., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, (ASMS conference 2004).

    Research output: Working paperProfessional

  11. Published

    Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry

    Östman, P., Marttila, S. J., Kotiaho, T., Franssila, S. & Kostiainen, R., 2004, In : Analytical Chemistry. 76, p. 6659-6664

    Research output: Contribution to journalArticleScientificpeer-review

  12. Published

    Pisaroita piikiekolla

    Franssila, S., 2004, In : Helsingin Sanomat. 23.3.2004

    Research output: Contribution to journalArticleProfessional

  13. Published

    Reusable multi-inlet PDMS fluidic connector

    Saarela, V. & Franssila, S., 2004, (Nanotech 2004 Montreux, November 16-18,2004).

    Research output: Working paperProfessional

  14. Published

    Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

    Tuomikoski, S. & Franssila, S., 2004, In : Physica Scripta. T114, p. 223-226

    Research output: Contribution to journalArticleScientificpeer-review

  15. 2003
  16. Published

    Droplet based self-assembly of SU-8 microparts

    Corral, S., Zhou, Q., Albut, A., Franssila, S., Tuomikoski, S. & Koivo, H., 2003, p. 13, (MICRO Tec 2003, Münich, Germany, October 13-15 2003).

    Research output: Working paperProfessional

  17. Published

    Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs

    Huikko, K., Östman, P., Sauber, C., Mandel, F., Grigoras, K., Franssila, S., Kotiaho, T. & Kostiainen, R., 2003, In : Rapid Communications in Mass Spectrometry. 17, p. 1339-1343

    Research output: Contribution to journalArticleScientificpeer-review

  18. Published

    Formation of nanoporous glass layer

    Grigoras, K. & Franssila, S., 2003, (Nordic Semiconductor Meeting 2003, Tampere, Finland).

    Research output: Working paperProfessional

  19. Published

    Luminescence study of silicon nanostructures prepared by ion beam mixing

    Ovchinnikov, V., Sokolov, V. & Franssila, S., 2003, In : Microelectronics Journal. 34, p. 579-581

    Research output: Contribution to journalArticleScientificpeer-review

  20. Published

    Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip

    Franssila, S., Marttila, S., Östman, P., Kotiaho, T. & Kostiainen, R., 2003, (Nanotech 2003, Montreaux, France 25-27. November 2003).

    Research output: Working paperProfessional

  21. Published

    Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

    Huikko, K., Östman, P., Grigoras, K., Tuomikoski, S., Tiainen, V-M., Soininen, A., Manz, A., Franssila, S., Kostiainen, R. & Kotiaho, T., 2003, In : Lab on a Chip. 3, p. 67-72

    Research output: Contribution to journalArticleScientificpeer-review

  22. Published

    Rapid thermal annealing of Cu/WNx/Si structures

    Lipsanen, A., Kuivalainen, P., Rauhala, E., Franssila, S. & Seppälä, A., 2003, In : Journal of Materials Science: Materials in Electronics. 14, p. 315-318

    Research output: Contribution to journalArticleScientificpeer-review

  23. Published

    SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot

    Tuomikoski, S., del Corral, C., Zhou, Q. & Franssila, S., 2003, (Micromechanics Europe, MME 3, Delft, Holland, October 2003).

    Research output: Working paperProfessional

  24. Published

    Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry

    Ovchinnikov, V., Franssila, S., Jiang, H., Nasibulin, A. G. & Kauppinen, E. I., 2003, Oxford, UK, p. 25-27, (The 20th Nordic Semiconductor Meeting, Tampere, Finland, August 25-27).

    Research output: Working paperProfessional

  25. Published

    Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

    Tuomikoski, S. & Franssila, S., 2003, (Nordic Semiconductor Meeting 2003, Tampere, Finland).

    Research output: Working paperProfessional

  26. 2002
  27. Published

    Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes

    Spehar, A-M., Vainio, P., Eskola, J., Nyman, A., Håkansson, M., Jiang, Q., Franssila, S. & Kulmala, S., 2002, (Euroanalysis 12, Dortmund, Germany, September 2002).

    Research output: Working paperProfessional

  28. Published

    Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing

    Ovchinnikov, V., Sokolov, V. & Franssila, S., 2002, p. PS-I-18, (4th International Conference on Low Dimensional Structures and Devices, Fortaleza, Braxil, December 8-13, 2002).

    Research output: Working paperProfessional

  29. Published

    Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)

    Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, In : Bio Forum International. 6, p. 214

    Research output: Contribution to journalArticleScientificpeer-review

  30. Published

    Microglow: a microsystems laboratory course

    Franssila, S., Tittonen, I., Grigoras, K., Juvonen, T., Nera, K. & Heikkilä, P., 2002, Micro Structure Workshop 2002, Aronsborg, Bålsta. p. paper A12

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  31. Published

    Micromechanics in silicon

    Juvonen, T., Poulsen, J. & Franssila, S., 2002, Micro Structure Workshop 2002, Aronsborg, Bålsta. p. paper B5

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  32. Published

    Microsystems and nanotechnology in the Nordic region

    Franssila, S., Furuberg, L., Enoksson, P., Grey, F. & Larsen, A., 2002, Proc. 8th Worl Micromachine Summit, Maastricht, 2002.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  33. Published

    Modified porous silicon surfaces as DIOS-MS sample plates

    Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, p. 503, (MicroTAS 2002, Nara, Japan).

    Research output: Working paperProfessional

  34. Published

    Optical interferometric detection of a mechanical silicon oscillator

    Nera, K., Hahtela, O., Franssila, S. & Tittonen, I., 2002, Channes, p. 430-438, (DTIP 2002 of MEMS and MOEMS, Mandelieu, France, May 5-8, 2002).

    Research output: Working paperProfessional

  35. Published

    PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

    Huikko, K., Östman, P., Grigoras, K., Tuomikoski, S., Tiainen, V-M., Soininen, A., Manz, A., Franssila, S., Kostiainen, R. & Kotiaho, T., 2002, p. 506, (MicroTAS 2002, Nara, Japan).

    Research output: Working paperProfessional

  36. Published

    Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)

    Tuomikoski, S., Huikko, K., Grigoras, K., Östman, P., Kotiaho, T., Kostiainen, R., Baumann, M. & Franssila, S., 2002, In : Lab on a chip. 2, 4, p. 247-253

    Research output: Contribution to journalArticleScientificpeer-review

  37. Published

    Silicon devices for chemistry and lifesciences

    Franssila, S., 2002, Suomen Kemian Seura, Kemian päivät 2002. p. 26-27

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  38. Published

    Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

    Tuomikoski, S., Huikko, K., Östman, P., Grigoras, K., Baumann, M., Kostiainen, R., Franssila, S. & Kotiaho, T., 2002, In : Bio Forum International. 2, p. 12

    Research output: Contribution to journalArticleScientificpeer-review

  39. 2001
  40. Published

    Bulk-Micromachined Silicon Microbridges for Infrared Emitters

    Grigoras, K., Juvonen, T., Nera, K., Heikkilä, P. & Franssila, S., 2001, (Micromechanics Europe 2001, Cork, Ireland, September 16-18).

    Research output: Working paperProfessional

  41. Published

    Microsystems education in the Nordic region

    Grey, F., Franssila, S., Furuberg, L. & Hjort, K., 2001, (7th World Micromachine Summit, Freiburg, April 30-May 2, 2001).

    Research output: Working paperProfessional

  42. Published

    Plasma etched initial pits for electrochemically etched macroporous silicon structures

    Grigoras, K., Niskanen, A. & Franssila, S., 2001, In : Journal of Micromechanics and Microengineering. 11, p. 371-375

    Research output: Contribution to journalArticleScientificpeer-review

  43. Published

    Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)

    Tuomikoski, S., Huikko, K., Grigoras, K., Niskanen, A., Kotiaho, T., Kostiainen, R., Franssila, S. & Baumann, M., 2001, NanoTech2001, Montreux, 27-29.11.2001.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  44. Published

    Submicron image reversal by liquid phase deposition of oxide

    Niskanen, A. & Franssila, S., 2001, In : Microelectronic Engineering. 57-58, p. 629-632

    Research output: Contribution to journalArticleScientificpeer-review

  45. 2000
  46. Published

    Deep Silicon Structures by Electrochemical Etching

    Grigoras, K., Niskanen, A. J. & Franssila, S., 2000, Uppsala, Sweden, (MME 2000 Micromechanics Europe, Uppsala, Sweden, 1.-3.10.2000).

    Research output: Working paperProfessional

  47. Published

    Depth and profile control in plasma etched MEMS structures

    Kiihamäki, J., Kattelus, H., Karttunen, J. & Franssila, S., 2000, In : Sensors and Actuators. 82, p. 234-238

    Research output: Contribution to journalArticleScientificpeer-review

  48. Published

    Etching through silicon wafer in inductively coupled plasma

    Franssila, S., Kiihamäki, J. & Karttunen, J., 2000, In : Microsystem Technologies. 6, p. 141-144

    Research output: Contribution to journalArticleScientificpeer-review

  49. Published

    Loading effects in deep silicon etching

    Karttunen, J., Kiihamäki, J. & Franssila, S., 2000, SPIE. p. 90-97

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  50. Published

    Submicron image reversal by liquid phase deposition of oxide

    Niskanen, A. J. & Franssila, S., 2000, p. s. TR-9P, (Micro and Nanoengineering (MNE 2000), Jena, Germany, Sept. 2000).

    Research output: Working paperProfessional

  51. 1999
  52. Published

    Deep silicon etching in inductively coupled plasma reactor for MEMS

    Kiihamäki, J. & Franssila, S., 1999, In : Physica Scripta. T79, T79, p. 250-254

    Research output: Contribution to journalArticleScientificpeer-review

  53. Published
  54. Published

    Pattern shape effects and artefacts in deep silicon etching

    Kiihamäki, J. & Franssila, S., 1999, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. A17, 4, p. 2280-2285

    Research output: Contribution to journalArticleScientificpeer-review

  55. 1998
  56. Published

    Valtaavatko mikropiirit elektroniikan?

    Franssila, S., 1998, In : Tiede 2000. 1

    Research output: Contribution to journalArticleProfessional

  57. 1997
  58. Published

    Reduction of molybdenum resistivity by a seed layer of Ti-W

    Franssila, S., Kattelus, H. & Nykänen, E., 1997, In : Microelectronic Engineering. 37/38, p. 373-380

    Research output: Contribution to journalArticleScientificpeer-review

ID: 36490