Inorganic Materials Chemistry

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• CCDC 1529882: Experimental Crystal Structure Determination

  Aleksandrova, I. (Contributor), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbz10, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbz10&sid=DataCite

  Dataset

• CCDC 1529883: Experimental Crystal Structure Determination

  Aleksandrova, I. (Creator), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbz21, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbz21&sid=DataCite

  Dataset

• CCDC 1529884: Experimental Crystal Structure Determination

  Solomatina, A. I. (Creator), Aleksandrova, I. (Creator), Karttunen, A. (Creator), Tunik, S. P. (Creator) & Koshevoy, I. O. (Creator), Cambridge Crystallographic Data Centre , 27 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbz32, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbz32&sid=DataCite

  Dataset

• Thermal Atomic Layer Etching of Aluminum Oxide (Al2O3) Using Sequential Exposures of Niobium Pentafluoride (NbF5) and Carbon Tetrachloride (CCl4): A Combined Experimental and Density Functional Theory Study of the Etch Mechanism

  Sharma, V. (Creator), Elliott, S. (Creator), Ritala, M. (Creator), Blomberg, T. (Creator), Haukka, S. (Creator), Givens, M. E. (Creator) & Tuominen, M. (Creator), 9 Apr 2021

  DOI: 10.1021/acs.chemmater.1c00142.s002, https://figshare.com/articles/dataset/Thermal_Atomic_Layer_Etching_of_Aluminum_Oxide_Al_sub_2_sub_O_sub_3_sub_Using_Sequential_Exposures_of_Niobium_Pentafluoride_NbF_sub_5_sub_and_Carbon_Tetrachloride_CCl_sub_4_sub_A_Combined_Experimental_and_Density_Functional_Theory_Study_of_/14394308?backTo=/collections/Thermal_Atomic_Layer_Etching_of_Aluminum_Oxide_Al_sub_2_sub_O_sub_3_sub_Using_Sequential_Exposures_of_Niobium_Pentafluoride_NbF_sub_5_sub_and_Carbon_Tetrachloride_CCl_sub_4_sub_A_Combined_Experimental_and_Density_Functional_Theory_Study_of_/5370716?backTo=/collections/Thermal_Atomic_Layer_Etching_of_Aluminum_Oxide_Al_sub_2_sub_O_sub_3_sub_Using_Sequential_Exposures_of_Niobium_Pentafluoride_NbF_sub_5_sub_and_Carbon_Tetrachloride_CCl_sub_4_sub_A_Combined_Experimental_and_Density_Functional_Theory_Study_of_/5370716

  Dataset

• CCDC 1529876: Experimental Crystal Structure Determination

  Aleksandrova, I. (Creator), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbyvs, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbyvs&sid=DataCite

  Dataset

• CCDC 1529878: Experimental Crystal Structure Determination

  Solomatina, A. I. (Creator), Aleksandrova, I. (Creator), Karttunen, A. (Creator), Tunik, S. P. (Creator) & Koshevoy, I. O. (Creator), Cambridge Crystallographic Data Centre , 27 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbyxv, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbyxv&sid=DataCite

  Dataset

• CCDC 1529877: Experimental Crystal Structure Determination

  Solomatina, A. I. (Creator), Aleksandrova, I. (Creator), Karttunen, A. (Creator), Tunik, S. P. (Creator) & Koshevoy, I. O. (Creator), Cambridge Crystallographic Data Centre , 27 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbywt, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbywt&sid=DataCite

  Dataset

• CCDC 1529881: Experimental Crystal Structure Determination

  Aleksandrova, I. (Creator), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbz0z, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbz0z&sid=DataCite

  Dataset

• CCDC 1529875: Experimental Crystal Structure Determination

  Solomatina, A. I. (Creator), Aleksandrova, I. (Creator), Karttunen, A. (Creator), Tunik, S. P. (Creator) & Koshevoy, I. O. (Creator), Cambridge Crystallographic Data Centre , 27 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbytr, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbytr&sid=DataCite

  Dataset

• CCDC 1529880: Experimental Crystal Structure Determination

  Aleksandrova, I. (Creator), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbyzx, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbyzx&sid=DataCite

  Dataset

• CCDC 1529879: Experimental Crystal Structure Determination

  Aleksandrova, I. (Creator), Karttunen, A. (Creator), Koshevoy, I. O. (Contributor), Solomatina, A. I. (Contributor) & Tunik, S. P. (Contributor), Cambridge Crystallographic Data Centre , 1 Jan 2017

  DOI: 10.5517/ccdc.csd.cc1nbyyw, http://www.ccdc.cam.ac.uk/services/structure_request?id=doi:10.5517/ccdc.csd.cc1nbyyw&sid=DataCite

  Dataset