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Research Output

Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces

Österlund, E., Suihkonen, S., Ross, G., Torkkeli, A., Kuisma, H. & Paulasto-Kröckel, M., 1 Feb 2020, In : Journal of Crystal Growth. 531, 125345.

Research output: Contribution to journalArticleScientificpeer-review

  • Atomic layer deposition of piezoelectric aluminum nitride thin films

    Österlund, E., Seppänen, H. & Paulasto-Kröckel, M., 16 Jul 2019.

    Research output: Contribution to conferencePosterScientific

    Open Access
  • Activities

    Low Temperature Wafer-Level Cu-In-Sn Solid Liquid Interdiffusion Bonding For Low Stress Applications

    Glenn Ross (Speaker), Vesa Vuorinen (Contributor), Joseph Hotchkiss (Contributor), Jani Kaaos (Contributor), Mervi Paulasto-Kröckel (Contributor)
    3 Dec 2019

    Activity: Talk or presentation typesConference presentation

    High-Resolution inspection for bonding voids in Solid-Liquid-Interdiffusion (SLID) bond interfaces by Acoustic GHz-Microscopy

    Sebastian Brand (Speaker), Michael Kögel (Contributor), Glenn Ross (Contributor), Vesa Vuorinen (Contributor), Mervi Paulasto-Kröckel (Contributor), Matthias Petzold (Contributor)
    27 Nov 201729 Nov 2017

    Activity: Talk or presentation typesConference presentation

    Keynote talk, at Micro/Nano-Electronics Packaging & Assembly, Design and Manufacturing Forum

    Mervi Paulasto-Kröckel (Keynote speaker)
    May 2017

    Activity: Talk or presentation typesKeynote or plenary lecture