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  • 2020

    Black Silicon

    Pasanen, T., 24 Apr 2020, Handbook of Silicon Based MEMS Materials and Technologies. 3 ed. Elsevier, p. 186-196 Part I. (Micro & Nano Technologies).

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

  • 2015

    Oxygen and Bulk Microdefects in Silicon

    Savin, H. & Airaksinen, V. M., 1 Jan 2015, Handbook of Silicon Based MEMS Materials and Technologies: Second Edition. Elsevier Inc., p. 421-424 4 p.

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

  • 2010

    Oxygen and bulk microdefects in silicon

    Savin, H. & Airaksinen, V-M., 2010, Handbook of silicon based MEMS materials and technologies. Burlington, MA USA; Oxford UK, p. 327-330

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review