Thin Solid Films

Research outputs

  1. 2019
  2. E-pub ahead of print

    In-situ annealing characterization of atomic-layer-deposited Al 2 O 3 in N 2 , H 2 and vacuum atmospheres

    Broas, M., Lemettinen, J., Sajavaara, T., Tilli, M., Vuorinen, V., Suihkonen, S. & Paulasto-Kröckel, M., 1 Jan 2019, In : Thin Solid Films. 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2017
  4. Published

    Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films

    Mäntymäki, M., Mizohata, K., Heikkilä, M. J., Räisänen, J., Ritala, M. & Leskelä, M., 31 Aug 2017, In : Thin Solid Films. 636, p. 26-33 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  5. Published
  6. 2016
  7. Published

    Synchrotron X-ray diffraction topography study of bonding-induced strain in silicon-on-insulator wafers

    Lankinen, A., Tuomi, T. O., Kostamo, P., Jussila, H., Sintonen, S., Lipsanen, H., Tilli, M., Mäkinen, J. & Danilewsky, A. N., 31 Mar 2016, In : Thin Solid Films. 603, p. 435-440 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  8. 2014
  9. Published

    Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

    Putkonen, M., Bosund, M., Ylivaara, O. M. E., Puurunen, R., Kilpi, L., Ronkainen, H., Sintonen, S., Ali, S., Lipsanen, H., Liu, X. & 6 othersHaimi, E., Hannula, S-P., Sajavaara, T., Buchanan, I., Karwacki, E. & Vähä-Nissi, M., 2 May 2014, In : Thin Solid Films. 558, p. 93-98 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  10. Published

    Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

    Ylivaara, O. M. E., Liu, X., Kilpi, L., Lyytinen, J., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Berdova, M. & 7 othersHaimi, E., Sajavaara, T., Ronkainen, H., Lipsanen, H., Koskinen, J., Hannula, S-P. & Puurunen, R. L., 3 Feb 2014, In : Thin Solid Films. 552, p. 124-135 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

    Vähä-Nissi, M., Pitkänen, M., Salo, E., Kenttä, E., Tanskanen, A., Sajavaara, T., Putkonen, M., Sievänen, J., Sneck, A., Rättö, M. & 2 othersKarppinen, M. & Harlin, A., 2014, In : Thin Solid Films. 562, xx, p. 331-337

    Research output: Contribution to journalArticleScientificpeer-review

  12. Published

    Conducting Nb-doped TiO2 thin films fabricated with an atomic layer deposition technique

    Niemela, J-P., Yamauchi, H. & Karppinen, M., 2014, In : Thin Solid Films. 551, xx, p. 19-22

    Research output: Contribution to journalArticleScientificpeer-review

  13. Published

    Excellent passivation and low reflectivity with atomic layer deposited bilayer coatings for n-type silicon solar cells

    Lee, B. G., Li, S., von Gastrow, G., Yli-Koski, M., Savin, H., Malinen, V., Skarp, J., Choi, S. & Branz, H. M., 2014, In : Thin Solid Films. 550, p. 541

    Research output: Contribution to journalArticleScientificpeer-review

  14. Published

    Three ranges of the angular dependence of critical current of BaZrO3 doped YBa2Cu3O7-(delta) thin films grown at different temperatures

    Malmivirta, M., Yao, L. D., Huhtinen, H., Palonen, H., van Dijken, S. & Paturi, P., 2014, In : Thin Solid Films. 562, p. 554-560 7 p.

    Research output: Contribution to journalArticleScientificpeer-review

  15. Published

    ZnO: Hydroquinone superlattice structures fabricated by atomic/molecular layer deposition

    Tynell, T. & Karppinen, M., 2014, In : Thin Solid Films. 551, xx, p. 23-26

    Research output: Contribution to journalArticleScientificpeer-review

  16. 2013
  17. Published

    Room temperature ferromagnetism down to 10 nanometer Ni-Fe-Mo alloy films

    Banerjee, M., Majumdar, A. K., Rai, S., Tiwari, P., Lodha, G. S., Banerjee, A., Nair, K. G. M., Sarkar, J., Choudhary, R. J. & Phase, D. M., 31 Oct 2013, In : Thin Solid Films. 545, p. 385-390 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  18. Published

    Photolithographic periodic patterning of gold using azobenzene-functionalized polymers

    Kravchenko, A., Shevchenko, A., Grahn, P., Ovchinnikov, V. & Kaivola, M., 1 Jul 2013, In : Thin Solid Films. 540, p. 162-167 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  19. Published

    Evaluation of critical thickness of GaP0.98N0.02 layer on GaP substrate by synchrotron X-ray diffraction topography

    Jussila, H., Subramaniyam, N., Sintonen, S., Suihkonen, S., Lankinen, A., Huhtio, T., Paulmann, C., Lipsanen, H., Tuomi, T. & Sopanen, M., 1 May 2013, In : Thin Solid Films. 534, p. 680-684 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  20. Published

    Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition

    Sagari, A. R. A., Malm, J., Laitinen, M., Rahkila, P., Hongqiang, M., Putkonen, M., Karppinen, M., Whitlow, H. J. & Sajavaara, T., 2013, In : Thin Solid Films. 531, xx, p. 26-31

    Research output: Contribution to journalArticleScientificpeer-review

  21. 2012
  22. Published

    Barrier properties of Al2O3 and alucone coatings and nanolaminates on flexible biopolymer films

    Vaha-Nissi, M., Sundberg, P., Kauppi, E., Hirvikorpi, T., Sievanen, J., Sood, A., Karppinen, M. & Harlin, A., 1 Sep 2012, In : Thin Solid Films. 520, 22, p. 6780-6785 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  23. Published

    Thermal properties of TiO2 films grown by atomic layer deposition

    Saleem, M. R., Silfsten, P., Honkanen, S. & Turunen, J., 1 Jun 2012, In : Thin Solid Films. 520, 16, p. 5442-5446 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  24. Published

    Barrier and mechanical properties of Al2O3 and alucone coatings and nanolaminates on biopolymer films

    Vähä-Nissi, M., Sundberg, P., Kauppi, E., Hirvikorpi, T., Sievänen, J., Sood, A., Karppinen, M. & Harlin, A., 2012, In : Thin Solid Films. 520, 520, p. 6780-6785

    Research output: Contribution to journalArticleScientificpeer-review

  25. Published

    Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

    Vähä-Nissi, M., Kauppi, E., Sahagian, K., Johansson, L-S., Peresin, M. S., Sievänen, J. & Harlin, A., 2012, In : Thin Solid Films. 1

    Research output: Contribution to journalArticleScientificpeer-review

  26. Published

    Textured Strontium Titanate Layers on Platinum by Atomic Layer Deposition

    Blomberg, T., Anttila, J., Haukka, S., Tuominen, M., Lukosius, M., Wenger, C. & Saukkonen, T., 2012, In : Thin Solid Films. 520, 21, p. 65356540

    Research output: Contribution to journalArticleScientificpeer-review

  27. 2011
  28. Published

    Comparison of dye solar cell counter electrodes based on different carbon nanostructures

    Aitola, K., Halme, J., Halonen, N., Kaskela, A., Toivola, M., Nasibulin, A. G., Kordás, K., Tóth, G., Kauppinen, E. I. & Lund, P. D., 1 Sep 2011, In : Thin Solid Films. 519, 22, p. 8125-8134 10 p.

    Research output: Contribution to journalArticleScientificpeer-review

  29. Published

    Optical and structural properties of nanocrystalline anatase (TiO2) thin films prepared by non-aqueous sol-gel dip-coating

    Haimi, E., Lipsonen, H., Larismaa, J., Kapulainen, M., Krzak-Ros, J. & Hannula, S-P., 1 Jul 2011, In : Thin Solid Films. 519, 18, p. 5882-5886 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  30. Published

    Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

    Malm, J., Sahramo, E., Perala, J., Sajavaara, T. & Karppinen, M., 2011, In : Thin Solid Films. 519, 16, p. 5319-5322

    Research output: Contribution to journalArticleScientificpeer-review

  31. 2010
  32. Published

    Diffusion of cobalt in ion-implanted ZnO

    Koskelo, O., Räisänen, J., Eversheim, D., Tuomisto, F., Grasza, K. & Mycielski, A., 3 May 2010, In : Thin Solid Films. 518, 14, p. 3894-3897 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

  33. Published

    Divacancies at room temperature in germanium

    Slotte, J., Kuitunen, K., Kilpeläinen, S. H., Tuomisto, F. & Capan, I., 26 Feb 2010, In : Thin Solid Films. 518, 9, p. 2314-2316 3 p.

    Research output: Contribution to journalArticleScientificpeer-review

  34. Published

    Atomic layer deposited aluminum oxide barrier coatings for packaging materials

    Hirvikorpi, T., Vaha-Nissi, M., Mustonen, T., Iiskola, E. & Karppinen, M., 2010, In : Thin Solid Films. 518, 10, p. 2654-2658

    Research output: Contribution to journalArticleScientificpeer-review

  35. Published

    Comparison of some coating techniques to fabricate barrier layers on packaging materials

    Hirvikorpi, T., Vähä-Nissi, M., Harlin, A. & Karppinen, M., 2010, In : Thin Solid Films. 518, 19, p. 5463-5466

    Research output: Contribution to journalArticleScientificpeer-review

  36. Published

    Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence

    Niskanen, A. J., Ylinen-Hinkka, T., Pusa, M., Kulmala, S. & Franssila, S., 2010, In : Thin Solid Films. 519, 1, p. 430-433

    Research output: Contribution to journalArticleScientificpeer-review

  37. 2009
  38. Published

    Effect of substrate deformation on functional properties of atomic-layer-deposited TiO2 coatings on stainless steel

    Straka, L., Kawakami, H., Romu, J., Ilola, R., Mahlberg, R., Heikkilä, M. & Hänninen, H., 1 May 2009, In : Thin Solid Films. 517, 13, p. 3797-3805 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  39. Published

    Photovoltaic fiber

    Toivola, M., Ferenets, M., Lund, P. & Harlin, A., 27 Feb 2009, In : Thin Solid Films. 517, 8, p. 2799-2802 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

  40. Published

    Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

    Putkonen, M., Sajavaara, T., Rahkila, P., Xu, L., Cheng, S., Niinistö, L. & Whitlow, H. J., 2009, In : Thin Solid Films. 517, p. 5819-5824

    Research output: Contribution to journalArticleScientificpeer-review

  41. Published

    Development and Characterization of Thin Polymer Films Relevant to Fiber Processing

    Song, J., Liang, J., Liu, X., Krause, W. E., Hinestroza, J. P. & Rojas, O. J., 2009, In : Thin Solid Films. 517, 15, p. 4348-4354

    Research output: Contribution to journalArticleScientificpeer-review

  42. Published

    Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

    Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M. & van Dijken, S., 2009, In : Thin Solid Films. 517, 24, p. 6588-6592 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  43. Published

    Ultrathin insulating films on silicon foe electrochemiluminescence

    Niskanen, A., Ylinen-Hinkka, T., Kulmala, S. & Franssila, S., 2009, In : Thin Solid Films. p. 5779-5782

    Research output: Contribution to journalArticleScientificpeer-review

  44. Published

    Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies

    Niskanen, A. J., Ylinen-Hinkka, T., Kulmala, S. & Franssila, S., 2009, In : Thin Solid Films. 517, 19, p. 5779-5782

    Research output: Contribution to journalArticleScientificpeer-review

  45. 2008
  46. Published

    Open-circuit potential as an indicator of damage of atomic layer deposited TiO2 on AISI 304 stainless steel

    Straka, L., Yagodzinskyy, Y., Kawakami, H., Romu, J., Ilola, R. & Hänninen, H., 28 Nov 2008, In : Thin Solid Films. 517, 2, p. 641-647 7 p.

    Research output: Contribution to journalArticleScientificpeer-review

  47. Published

    Implantation Defects and n-type Doping in Ge and Ge rich SiGe

    Peaker, A. R., Markevich, V. P., Hamilton, B., Hawkins, I. D., Slotte, J., Kuitunen, K., Tuomisto, F., Satta, A., Simoen, E. & Abrosimov, N., 3 Nov 2008, In : Thin Solid Films. 517, 1, p. 152-154 3 p.

    Research output: Contribution to journalArticleScientificpeer-review

  48. Published

    Characterization and Gas-Sensing Properties of Iron Oxide Thin Films Prepared by Atomic Layer Deposition

    Aronniemi, M., Sainio, J. & Lahtinen, J., 2008, In : Thin Solid Films. 516, p. 6110-6115

    Research output: Contribution to journalArticleScientificpeer-review

  49. Published

    Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through

    Grigoras, K., Franssila, S. & Airaksinen, V-M., 2008, In : Thin Solid Films. 516

    Research output: Contribution to journalArticleScientificpeer-review

  50. 2006
  51. Published

    Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

    Harjuoja, J., Kosola, A., Putkonen, M. & Niinistö, L., 2006, In : Thin Solid Films. 496, 2, p. 346-352

    Research output: Contribution to journalArticleScientificpeer-review

  52. Published

    Atomic layer deposition of B2O3 thin films at room temperature

    Putkonen, M. & Niinistö, L., 2006, In : Thin Solid Films. 514, p. 145-149

    Research output: Contribution to journalArticleScientificpeer-review

  53. Published

    Exploiting volatile lead compounds as precursors for the atomic layer deposition of lead dioxide thin films

    Harjuoja, J., Putkonen, M. & Niinistö, L., 2006, In : Thin Solid Films. 497, 1-2, p. 77-82

    Research output: Contribution to journalArticleScientificpeer-review

  54. 2005
  55. Published

    A comparative study on lanthanide oxide thin films grown by atomic layer deposition

    Päiväsaari, J., Putkonen, M. & Niinistö, L., 2005, In : Thin Solid Films. 472, 1-2, p. 275-281

    Research output: Contribution to journalArticleScientificpeer-review

  56. Published

    Experimental studies of O2-SnO2 surface interaction using powder, thick films and monocrystalline thine films

    Saukko, S., Lassi, U., Lantto, V., Kroneld, M., Novikov, S., Kuivalainen, P., Rantala, T. T. & Mizsei, J., 2005, In : Thin Solid Films. 490, p. 48-53

    Research output: Contribution to journalArticleScientificpeer-review

  57. Published

    Neodymium oxide and neodymium aluminate thin films by atomic layer deposition

    Kosola, A., Päiväsaari, J., Putkonen, M. & Niinistö, L., 2005, In : Thin Solid Films. 479, 1-2, p. 152-159

    Research output: Contribution to journalArticleScientificpeer-review

  58. 2004
  59. Published

    Infrared reflection absorption spectroscopy study of smectite clay monolayers

    Ras, R. H. A., Németh, J., Johnston, C. T., Dékány, I. & Schoonheydt, R. A., 1 Nov 2004, In : Thin Solid Films. 466, 1-2, p. 291-294 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

  60. Published

    Magnesium aluminate thin films by atomic layer deposition from organometallic precursors and water

    Putkonen, M., Nieminen, M. & Niinistö, L., 2004, In : Thin Solid Films. 466, p. 103-107

    Research output: Contribution to journalArticleScientificpeer-review

  61. 2003
  62. Published

    Microstructural analysis of selective C/Al2O3/Al solar absorber surfaces

    Konttinen, P., Kilpi, R. & Lund, P., 3 Feb 2003, In : Thin Solid Films. 425, 1-2, p. 24-30 7 p., PII S0040-6090(02)01141-0.

    Research output: Contribution to journalArticleScientificpeer-review

  63. Published

    Surface Modification and Characterization of Photodefinable Epoxy/Copper Systems

    Ge, J., Turunen, M. & Kivilahti, J., 2003, In : Thin Solid Films. 1-2, p. 198-204

    Research output: Contribution to journalArticleScientificpeer-review

  64. 2001
  65. Published

    Photoluminescence and the tetragonal distortion in CuInS_2

    Krustok, J., Raudoja, J. & Collan, H., 2001, In : Thin Solid Films. 387, p. 195-197

    Research output: Contribution to journalArticleScientificpeer-review

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