Sensors and Actuators A: Physical

Research outputs

  1. 2013
  2. Published

    Sensitivity-improved silicon cantilever microphone for acousto-optical detection

    Sievilä, P., Chekurov, N., Raittila, J. & Tittonen, I., 2013, In : Sensors and Actuators A: Physical. 190, p. 90-95

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2012
  4. Published

    Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

    Puurunen, R. L., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & 1 othersKattelus, H., Dec 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  5. Published

    Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films

    Puurunen, R. L., Suni, T., Ylivaara, O. M. E., Kondo, H., Ammar, M., Ishida, T., Fujita, H., Bosseboeuf, A., Zaima, S. & Kattelus, H., Dec 2012, In : Sensors and Actuators A: Physical. 188, p. 268-276 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  6. 2010
  7. Published

    Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

    Laamanen, M., Blomberg, M., Puurunen, R. L., Miranto, A. & Kattelus, H., Aug 2010, In : Sensors and Actuators A: Physical. 162, 2, p. 210-214 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  8. Published

    Octree-search Kinetic Monte Carlo

    Gosalvez, M. A., Xing, Y., Sato, K. & Nieminen, R. M., 2010, In : Sensors and Actuators A: Physical. A159, 1, p. 64-68

    Research output: Contribution to journalArticleScientificpeer-review

  9. 2009
  10. Published

    Continuous-Time Interface for a Micromachined Capacitive Accelerometer with NEA of 4 ug and Bandwidth of 300 Hz

    Aaltonen, L. & Halonen, K., 2009, In : Sensors & Actuators: A Physical. 154, 1, p. 46-56

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Discrete and continous cellular automata for the simulation of propagating surfaces

    Gosalvez, M., Xing, Y., Sato, K. & Nieminen, R. M., 2009, In : Sensors and Actuators A. 155, 93

    Research output: Contribution to journalArticleScientificpeer-review

  12. Published

    Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

    Sainiemi, L., Grigoras, K., Kassamakov, I., Hanhijärvi, K., Aaltonen, J., Fan, J., Saarela, V., Haeggström, E. & Franssila, S., 2009, In : Sensors and Actuators A, Physical. 149, 2, p. 305-314

    Research output: Contribution to journalArticleScientificpeer-review

  13. 2008
  14. Published

    GHz-range FSK-reception with microelectromechanical resonators

    Koskenvuori, M., Tittonen, I. & Alastalo, A., 2008, In : Sensors and Actuators A: Physical. 142, 1, p. 346-351

    Research output: Contribution to journalArticleScientificpeer-review

  15. Published

    Interface and Control Electronics for a Bulk MIcromachined Capacitive Gyproscope

    Saukoski, M., Aaltonen, L., Salo, T. & Halonen, K., 2008, In : Sensors and Actuators A: Physical. 147, 1, 15, p. 183-193

    Research output: Contribution to journalArticleScientificpeer-review

  16. 2006
  17. Published

    Moisture sensor at glass/polymer interface for monitoring of photovoltaic module encapsulants

    Carlsson, T., Halme, J., Lund, P. & Konttinen, P., 10 Jan 2006, In : Sensors and Actuators A: Physical. 125, 2, p. 281-287 7 p.

    Research output: Contribution to journalArticleScientificpeer-review

  18. 2005
  19. Published

    Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

    Tuomikoski, S. & Franssila, S., 2005, In : Sensors and Actuators A. 120, 2, p. 408-415

    Research output: Contribution to journalArticleScientificpeer-review

  20. Published

    Transient Capacitance Measurement of MEM Capacitor

    Nieminen, H., Hyyryläinen, J., Veijola, T., Ryhänen, T. & Ermolov, V., 2005, In : Sensors and Actuators A. A117, p. 267-272

    Research output: Contribution to journalArticleScientificpeer-review

  21. 2004
  22. Published

    Long-term stability of single-crystal silicon microresonators

    Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Oja, A., Seppä, H. & Tittonen, I., 2004, In : Sensors and Actuators A: Physical. 115, p. 23-27

    Research output: Contribution to journalArticleScientificpeer-review

  23. 2002
  24. Published

    14 MHz micromechanical oscillator

    Tittonen, I., Mattila, T., Jaakkola, O., Kiihamäki, J., Lamminmäki, T., Rantakari, P., Oja, A., Seppä, H. & Kattelus, H., 2002, In : Sensors and Actuators A. 97-98, p. 497-502

    Research output: Contribution to journalArticleScientificpeer-review

  25. 2000
  26. Published

    Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate.

    Torkkeli, A., Saarilahti, J., Seppä, H., Sipola, H., Rusanen, O. & Hietanen, J., 2000, In : Sensors and Actuators A. 85, p. 116-123

    Research output: Contribution to journalArticleScientificpeer-review

  27. Published

    Damping of a vibrating beam

    Hietanen, J., Bomer, J., Jonsmann, J., Olthuis, W., Bergveld, P. & Kaski, K., 2000, In : Sensors and Actuators A: Physical. 86, p. 39-44

    Research output: Contribution to journalArticleScientificpeer-review

  28. 1999
  29. Published

    Dynamic simulation model for a vibrating fluid density sensor

    Veijola, T., Corman, T., Enoksson, P. & Stemme, G., 1999, In : Sensors and Actuators A. A76, p. 213-224

    Research output: Contribution to journalArticleScientificpeer-review

  30. 1998
  31. Published

    The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

    Veijola, T., Kuisma, H. & Lahdenperä, J., 1998, In : Sensors and Actuators A. A66, p. 83-92

    Research output: Contribution to journalArticleScientificpeer-review

  32. 1997
  33. Published

    Simulation Model for Micromechanical Angular Rate Sensor

    Veijola, T., Kuisma, H., Lahdenperä, J. & Ryhänen, T., 1997, In : Sensors and Actuators A. A60, p. 113-121

    Research output: Contribution to journalArticleScientificpeer-review

  34. 1995
  35. Published

    Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

    Veijola, T., Kuisma, H., Lahdenperä, J. & Ryhänen, T., 1995, In : Sensors and Actuators A. 48, 3, p. 239-248

    Research output: Contribution to journalArticleScientificpeer-review

  36. 1993
  37. Published

    The use of depolarized Rayleigh-scattering for measurement applications in process industry

    Toropainen, A., 1993, In : Sensors and Actuators A. 37-38, p. 323-327

    Research output: Contribution to journalArticleScientificpeer-review

ID: 388572