Journal of Micromechanics and Microengineering

Research outputs

  1. 2019
  2. Published

    Wicking and chromatographic properties of highly porous functionalised calcium carbonate coatings custom-designed for microfluidic devices

    Jutila, E., Koivunen, R., Bollström, R. & Gane, P., 20 Mar 2019, In : Journal of Micromechanics and Microengineering. 29, 5, 14 p., 055004.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2018
  4. Published

    Electrode configuration and electrical dissipation of mechanical energy in quartz crystal resonators

    Välimaa, A., Santos, J. T., Ockeloen-Korppi, C. & Sillanpää, M., 2018, In : Journal of Micromechanics and Microengineering. 28, 9, p. 1-9 095014.

    Research output: Contribution to journalArticleScientificpeer-review

  5. 2014
  6. Published

    MME 2013 Editorial Preface

    Franssila, S. & Kolari, K., Aug 2014, In : Journal of Micromechanics and Microengineering. 24, 8, 1 p., 080201.

    Research output: Contribution to journalEditorialScientific

  7. 2013
  8. Published

    Picosecond laser ablation for silicon micro fuel cell fabrication

    Scotti, G., Trusheim, D., Kanninen, P., Naumenko, D., Shulz-Ruhtenberg, M., Snitka, V., Kallio, T. & Franssila, S., 18 Apr 2013, In : Journal of Micromechanics and Microengineering. 23, 5, p. 1-14 14 p.

    Research output: Contribution to journalArticleScientificpeer-review

  9. Published
  10. Published

    Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

    Wirtssohn, M., Haapala, M., Sainiemi, L. & Franssila, S., 2013, In : Journal of Micromechanics and Microengineering. p. 6

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Micromanipulation transfer of membrane resonators for circuit optomechanics

    Berdova, M., Cho, S. U., Pirkkalainen, J-M., Sulkko, J., Song, X., Hakonen, P. J. & Sillanpää, M. A., 2013, In : Journal of Micromechanics and Microengineering. 23, 12, 5 p., 125024.

    Research output: Contribution to journalArticleScientificpeer-review

  12. 2012
  13. Published

    Direct laser writing and geometrical analysis of scaffolds with designed pore architecture for three-dimensional cell culturing

    Käpylä, E., Aydogan, D. B., Virjula, S., Vanhatupa, S., Miettinen, S., Hyttinen, J. & Kellomäki, M., 1 Nov 2012, In : Journal of Micromechanics and Microengineering. 22, 11, 115016.

    Research output: Contribution to journalArticleScientificpeer-review

  14. Published

    Integration of carbon felt gas diffusion layers in silicon micro fuel cells

    Scotti, G., Kanninen, P., Kallio, T. & Franssila, S., 24 Aug 2012, In : Journal of Micromechanics and Microengineering. 22, 9, 9 p., 094006.

    Research output: Contribution to journalArticleScientificpeer-review

  15. 2011
  16. Published

    A single-pixel wireless contact lens display

    Lingley, A. R., Ali, M., Liao, Y., Mirjalili, R., Klonner, M., Sopanen, M., Suihkonen, S., Shen, T., Otis, B. P., Lipsanen, H. & 1 othersParviz, B. A., 2011, In : Journal of Micromechanics and Microengineering. 21, 12, p. 1-8 8 p., 125014.

    Research output: Contribution to journalArticleScientificpeer-review

  17. Published

    Building molecular surface gradients with electron beam lithography

    Toikkanen, O., Doan, N., Erdmanis, M., Lipsanen, H., Kontturi, K. & Parviz, B., 2011, In : Journal of Micromechanics and Microengineering. 21, 5, p. 1-5 5 p., 054025.

    Research output: Contribution to journalArticleScientificpeer-review

  18. Published

    Porous inorganic-organic hybrid material by oxygen plasma treatment

    Aura, S., Jokinen, V., Laitinen, M., Sajavaara, T. & Franssila, S., 2011, In : Journal of Micromechanics and Microengineering. 21, 12, 125003.

    Research output: Contribution to journalArticleScientificpeer-review

  19. Published

    Self-alignment in the stacking of microchips with mist-induced water droplets

    Chang, B., Sariola, V., Jääskeläinen, M. & Zhou, Q., 2011, In : Journal of Micromechanics and Microengineering. 21, 1, p. 11

    Research output: Contribution to journalArticleScientificpeer-review

  20. Published

    Self-alignment of RFID dies on four-pad patterns with water droplet for sparse self-assembly

    Chang, B., Routa, I., Sariola, V. & Zhou, Q., 2011, In : Journal of Micromechanics and Microengineering. 21, 9, p. 12

    Research output: Contribution to journalArticleScientificpeer-review

  21. 2010
  22. Published

    Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

    Chekurov, N., Grigoras, K., Sainiemi, L., Peltonen, A., Tittonen, I. & Franssila, S., 2010, In : Journal of Micromechanics and Microengineering. 20, 8, p. 085009

    Research output: Contribution to journalArticleScientificpeer-review

  23. Published

    Modelling and validation of air damping in perforated gold and silicon MEMS plates

    De Pasquale, G., Veijola, T. & Somà, A., 2010, In : Journal of Micromechanics and Microengineering. 20, 1, p. 015010

    Research output: Contribution to journalArticleScientificpeer-review

  24. Published

    Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

    Sainiemi, L., Viheriälä, J., Sikanen, T., Laukkanen, J. & Niemi, T., 2010, In : Journal of Micromechanics and Microengineering. 20, 7, p. 077001

    Research output: Contribution to journalArticleScientificpeer-review

  25. 2009
  26. Published

    Analysis of vibration modes in a micromechanical square-plate resonator

    Holmgren, O., Kokkonen, K., Veijola, T., Mattila, T., Kaajakari, V., Oja, A., Knuuttila, J. & Kaivola, M., 2009, In : Journal of Micromechanics and Microengineering. 19, 1, p. 1-11 11 p., 015028.

    Research output: Contribution to journalArticleScientificpeer-review

  27. Published

    Microflidic heated gas jet shape analysis by temperature scanning

    Saarela, V., Haapala, M., Kostiainen, R., Kotiaho, T. & Franssila, S., 2009, In : Journal of Micromechanics and Microengineering. 19, 5

    Research output: Contribution to journalArticleScientificpeer-review

  28. 2008
  29. Published

    Atomistic methods for the simulation of evolving surfaces

    Gosalvez, M. A., Xing, Y., Sato, K. & Nieminen, R. M., 2008, In : Journal of Micromechanics and Microengineering. 18

    Research output: Contribution to journalArticleScientificpeer-review

  30. 2007
  31. Published

    An atomistic introduction to anisotropic etching

    Gosálvez, M. A., Sato, K., Foster, A. S., Nieminen, R. M. & Tanaka, H., 2007, In : Journal of Micromechanics and Microengineering. 17, 4, p. S1-S26 26 p.

    Research output: Contribution to journalArticleScientificpeer-review

  32. Published

    Atomic laeyr deposited alumina (A12O3) thin films on a high-Q mechanical silicon oscillator

    Hahtela, O., sievilä, P., Chekurov, N. & Tittonen, I., 2007, In : Journal of Micromechanics and Microengineering. 17, 4, p. 737-742

    Research output: Contribution to journalArticleScientificpeer-review

  33. Published

    Atomic layer deposition enhanced rapid dry fabrication of micromechanical devices with cryogenic deep raective ion etching

    Chekurov, N., Koskenvuori, M., Airaksinen, V-M. & Tittonen, I., 2007, In : Journal of Micromechanics and Microengineering. 17, 8

    Research output: Contribution to journalArticleScientificpeer-review

  34. Published

    Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing

    Sievilä, P., Rytkölä, V-P., Hahtela, O., Chekurov, N., Kauppinen, J. & Tittonen, I., 2007, In : Journal of Micromechanics and Microengineering. 17, 5, p. 852-859

    Research output: Contribution to journalArticleScientificpeer-review

  35. Published

    Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)

    Gosálvez, M. A., Xing, Y., Hynninen, T., Uwaha, M., Foster, A. S., Nieminen, R. M. & Sato, K., 2007, In : Journal of Micromechanics and Microengineering. 17, 4, p. S27-S37 11 p.

    Research output: Contribution to journalArticleScientificpeer-review

  36. 2005
  37. Published

    Extending the Validity of Squeezed-Film Damper Models with Elongations of Surface Dimensions

    Veijola, T., Pursula, A. & Råback, P., 2005, In : Journal of Micromechanics and Microengineering. 15, p. 1624-1636

    Research output: Contribution to journalArticleScientificpeer-review

  38. Published

    Non-tilting out-of-plane mode high-Q-mechanical silicon oscillator

    Hahtela, O., Chekurov, N. & Tittonen, I., 2005, In : Journal of Micromechanics and Microengineering. 15, p. 1848-1853

    Research output: Contribution to journalArticleScientificpeer-review

  39. 2004
  40. Published

    Compact Models for Squeezed-Film Dampers with Inertial and Rarefied Gas Effects

    Veijola, T., 2004, In : Journal of Micromechanics and Microengineering. 14, 7, p. 1109-1118

    Research output: Contribution to journalArticleScientificpeer-review

  41. 2001
  42. Published

    Plasma etched initial pits for electrochemically etched macroporous silicon structures

    Grigoras, K., Niskanen, A. & Franssila, S., 2001, In : Journal of Micromechanics and Microengineering. 11, p. 371-375

    Research output: Contribution to journalArticleScientificpeer-review

  43. Published

    PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES

    Grigoras, K., Niskanen, A. J. & Franssila, S., 2001, In : Journal of Micromechanics and Microengineering. 11, 4, p. 371-375

    Research output: Contribution to journalArticleScientificpeer-review

  44. 1993
  45. Published

    Microtensile testing of free-standing polysilicon fibers of various grain sizes

    Koskinen, J., Steinwall, J. E., Soave, R. & Johnson, H. H., 1993, In : Journal of Micromechanics and Microengineering. 3, 1, p. 13-17 5 p., 004.

    Research output: Contribution to journalArticleScientificpeer-review

ID: 308108