Journal of Microelectromechanical Systems

Research outputs

  1. 2019
  2. Published

    Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-electromechanical Systems

    Liu, Z., Vähänissi, V., Chekurov, N., Tittonen, I. & Savin, H., Aug 2019, In : Journal of Microelectromechanical Systems. 28, 4, p. 695 - 699 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2015
  4. Published

    Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations

    Lipiäinen, L., Kokkonen, K. & Kaivola, M., 1 Oct 2015, In : Journal of Microelectromechanical Systems. 24, 5, p. 1642-1646 5 p., 7113753.

    Research output: Contribution to journalArticleScientificpeer-review

  5. 2014
  6. Published

    Bulk-Aluminum Microfabrication for Micro Fuel Cells

    Scotti, G., Kanninen, P., Kallio, T. & Franssila, S., Apr 2014, In : Journal of Microelectromechanical Systems. 23, 2, p. 372-379 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  7. Published

    Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope

    Li, J., Broas, M., Makkonen, J., Mattila, T. T., Hokka, J. & Paulasto-Kröckel, M., 2014, In : Journal of Microelectromechanical Systems. 23, 2, p. 347-355

    Research output: Contribution to journalArticleScientificpeer-review

  8. Published

    Surface Tension-Driven Self-Alignment of Microchips on Low-Precision Receptors

    Routa, I., Chang, B., Shah, A. & Zhou, Q., 2014, In : Journal of Microelectromechanical Systems. 23, 4, p. 819-828

    Research output: Contribution to journalArticleScientificpeer-review

  9. 2013
  10. Published

    Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air

    Shah, A., Chang, B., Suihkonen, S., Zhou, Q. & Lipsanen, H., 21 Feb 2013, In : Journal of Microelectromechanical Systems. 22, 3, p. 739-746 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Non-destructive inspection of buried channels and cavities in silicon

    Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Franssila, S. & Hæggström, E., 2013, In : Journal of Microelectromechanical Systems. p. 438

    Research output: Contribution to journalArticleScientificpeer-review

  12. 2008
  13. Published

    Towards micromechanical radio; Overtone excitations of a microresonator through the non-linearities of 2nd and 3rd order

    Koskenvuori, M., Alastalo, A. & Tittonen, I., 2008, In : Journal of Microelectromechanical Systems. 17

    Research output: Contribution to journalArticleScientificpeer-review

  14. 2006
  15. Published

    A microfabricated nebulizer for liquid vaporization in chemical analysis

    Franssila, S., Marttila, S., Kolari, K., Östman, P., Kotiaho, T., Kostiainen, R., Lehtiniemi, R., Fager, C-M. & Manninen, J., 2006, In : Journal of Microelectromechanical Systems. 15, 5, p. 1251-1259

    Research output: Contribution to journalArticleScientificpeer-review

  16. 2001
  17. Published

    Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects

    Veijola, T. & Turowski, M., 2001, In : Journal of Microelectromechanical Systems. 10, 2, p. 263-272

    Research output: Contribution to journalArticleScientificpeer-review

ID: 308078