APPLIED PHYSICS REVIEWS

Research outputs

  1. 2019
  2. Published

    Atomic layer deposition of metals: Precursors and film growth

    Hagen, D. J., Pemble, M. E. & Karppinen, M., 1 Dec 2019, In : APPLIED PHYSICS REVIEWS. 6, 4, 5087759.

    Research output: Contribution to journalReview ArticleScientificpeer-review

  3. Published

    Conformality in atomic layer deposition: Current status overview of analysis and modelling

    Cremers, V., Puurunen, R. L. & Dendooven, J., 1 Jun 2019, In : APPLIED PHYSICS REVIEWS. 6, 2, 021302.

    Research output: Contribution to journalReview ArticleScientificpeer-review

ID: 179038