OtaNano

Aalto University

Facility/equipment: Facility

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    Micronova (Nanofabrication): Tietotie 3; Nano Building (Nanomicroscopy Center and Low Temperature Laboratory): Puumiehenkuja 2B

    Espoo

    02150

    Finland

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  • 2024

    Electromigration Reliability of Cu3Sn Microbumps for 3D Heterogeneous Integration

    Tiwary, N., Grosse, C., Kögel, M., Windemuth, T., Ross, G., Vuorinen, V., Brand, S. & Paulasto-Kröckel, M., 2024, 2024 IEEE 10th Electronics System-Integration Technology Conference, ESTC 2024 - Proceedings. IEEE, 7 p. ( Electronics System-Integration Technology Conference).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    79 Downloads (Pure)

  • Lasing in nanoparticle arrays with complex unit cells

    Heilmann, R., Arjas, K. & Törmä, P., 2024, Nanophotonics X. Andrews, D. L., Bain, A. J. & Ambrosio, A. (eds.). SPIE, p. 1-7 7 p. 129910H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12991).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    60 Downloads (Pure)

  • Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers

    Morozova, O., Chen, K., Radfar, B., Kentsch, U., Antwis, L., Savin, H. & Vähänissi, V., 2024, Proceedings of the 41st European Photovoltaic Solar Energy Conference and Exhibition. EU PVSEC, 4 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    18 Downloads (Pure)
  • 2023

    Improved QE in CMOS image sensors with nano-black antireflection layer

    Prest, M. J., Setälä, O., Stefanov, K. D., Vähänissi, V., Savin, H. & Jordan, D., 22 May 2023, 2023 International Image Sensor Workshop Proceedings.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • Spatial uniformity of black silicon induced junction photodiode responsivity

    Heinonen, J., Haarahiltunen, A., Vähänissi, V., Pasanen, T. P., Savin, H., Toivanen, J. & Juntunen, M. A., 14 Mar 2023, Optical Components and Materials XX. Jiang, S. & Digonnet, M. J. (eds.). SPIE, 7 p. 1241713. (Proceedings of SPIE : the International Society for Optical Engineering).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    32 Downloads (Pure)
  • 2022

    Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes

    Heinonen, J., Haarahiltunen, A., Vähänissi, V., Pasanen, T. P., Savin, H. & Juntunen, M. A., 4 Mar 2022, Optical Components and Materials XIX. SPIE, Vol. 11997. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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    3 Citations (Scopus)
    65 Downloads (Pure)
  • 2021

    Improved stability of black silicon detectors using aluminum oxide surface passivation

    Heinonen, J., Haarahiltunen, A., Kettunen, H., Jaatinen, J., Rossi, M., Heino, J., Savin, H. & Juntunen, M., 11 Jun 2021, International Conference on Space Optics: ICSO 2020. SPIE, Vol. 11852. p. 118520T 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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    4 Citations (Scopus)
    53 Downloads (Pure)

  • Low-temperature Metal Bonding for Optical Device Packaging

    Golim, O., Vuorinen, V., Tiwary, N., Ross, G. & Paulasto-Kröckel, M., 13 Nov 2021, Proceedings of 23rd European Microelectronics and Packaging Conference & Exhibition, EMPC 2021. IEEE, 4 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    6 Citations (Scopus)
    271 Downloads (Pure)

  • Small scale, big impact: The world's thinnest and strongest free-standing carbon nanotube membrane

    Etula, J., Mikladal, B., Makkonen, M., Kauppinen, E. & Varjos, I., 2021, International Conference on Extreme Ultraviolet Lithography 2021. Ronse, K. G., Naulleau, P. P., Gargini, P. A., Itani, T. & Hendrickx, E. (eds.). SPIE, p. 1-6 6 p. 118540S. (Proceedings of SPIE; vol. 11854).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    5 Citations (Scopus)
    119 Downloads (Pure)

  • Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes

    Heinonen, J., Haarahiltunen, A., Serue, M., Kriukova, D., Vähänissi, V., Pasanen, T. P., Savin, H. & Juntunen, M. A., 5 Mar 2021, Optical Components and Materials XVIII. SPIE, Vol. 11682. 6 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    406 Downloads (Pure)
  • 2020

    Black silicon boron emitter solar cells with EQE above 95% in UV

    Chen, K., Vähänissi, V., Rad, Z. J., Lehtio, J. P., Laukkanen, P., Yli-Koski, M. & Savin, H., 2020, Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020. IEEE, p. 2586-2589 4 p. 9300686. (Conference record of the IEEE Photovoltaic Specialists Conference).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    1 Citation (Scopus)

  • Can hydrogenation mitigate Cu-induced bulk degradation in silicon?

    Heikkinen, I. T. S., Wright, B., Soeriyadi, A. H., Yli-Koski, M., Kim, M., Vähänissi, V., Hallam, B. J. & Savin, H., 2020, Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020. IEEE, p. 2582-2585 4 p. 9300619

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    1 Citation (Scopus)
    95 Downloads (Pure)

  • Distinction of the thermoelectric effect in graphene FET THz detectors

    Generalov, A. A., Ludwig, F., Ahmadi, M., Bonmann, M., Vorobiev, A., Soikkeli, M., Arpiainen, S., Prunnila, M., Stake, J., Roskos, H. G. & Sun, Z., 8 Nov 2020, 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE, p. 504-505 2 p. 9370957. (International Conference on Infrared, Millimeter, and Terahertz Waves).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    1 Citation (Scopus)

  • High-sensitivity NIR photodiodes using black silicon

    Heinonen, J., Haarahiltunen, A., Serue, M., Vähänissi, V., Pasanen, T., Savin, H., Werner, L. & Juntunen, M., 2020, Optical Components and Materials XVII. SPIE, Vol. 11276. 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    5 Citations (Scopus)
    299 Downloads (Pure)

  • Study of Cu-Sn-In system for low temperature, wafer level solid liquid inter-diffusion bonding

    Hotchkiss, J., Vuorinen, V., Dong, H., Ross, G., Kaaos, J., Paulasto-Krockel, M., Wernicke, T. & Ponninger, A., 15 Sept 2020, Proceedings - 2020 IEEE 8th Electronics System-Integration Technology Conference, ESTC 2020. IEEE, 5 p. 9229696

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    7 Citations (Scopus)
    271 Downloads (Pure)

  • Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

    Bespalova, K., Ross, G., Paulasto-Kröckel, M., Thanniyil, A. S., Karuthedath, C., Mertin, S. & Pensala, T., 7 Sept 2020, Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020. IEEE, 4 p. 9251496. (IEEE International Ultrasonics Symposium).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    3 Citations (Scopus)
  • 2019

    Characterization of mmWave radomes for base stations and automotive radars

    Järveläinen, J., Karttunen, A., Aurinsalo, J., Huhtinen, I. & Hujanen, A., 1 Mar 2019, Proceedings of the European Conference on Antennas and Propagation. EurAAP Italia, 8739914. (Proceedings of the European Conference on Antennas and Propagation).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • Low-T anneal as cure for LeTID in Mc-Si PERC cells

    Yli-Koski, M., Pasanen, T. P., Heikkinen, I., Serué, M. & Savin, H., 27 Aug 2019, SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. 1 ed. AIP Publishing, Vol. 2147. (AIP Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    6 Citations (Scopus)
    107 Downloads (Pure)

  • Millimeter-wave stepped series array with LTCC

    Karki, S. K., Ala-Laurinaho, J., Zheng, J., Lahti, M. & Viikari, V., 1 Oct 2019, EuRAD 2019 - 2019 16th European Radar Conference. IEEE, p. 321-324 4 p. 8904752

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    2 Citations (Scopus)
    69 Downloads (Pure)

  • Millimeter-wave stepped series array with LTCC

    Karki, S. K., Ala-Laurinaho, J., Zheng, J., Lahti, M. & Viikari, V., 1 Oct 2019, 2019 49th European Microwave Conference, EuMC 2019. IEEE, p. 956-959 4 p. 8910765

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    137 Downloads (Pure)

  • Observation of local electroluminescent cooling and identifying the remaining challenges

    Radevici, I., Sadi, T., Tripurari, T., Tiira, J., Ranta, S., Tukiainen, A., Guina, M. & Oksanen, J., 1 Jan 2019, Photonic Heat Engines: Science and Applications. Seletskiy, D. V., Epstein, R. I. & Sheik-Bahae, M. (eds.). SPIE, 109360A. (Proceedings of SPIE; vol. 10936).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    241 Downloads (Pure)

  • Rapid mode-switching for acoustic manipulation

    Latifi, K., Kopitca, A. & Zhou, Q., 1 Jul 2019, Proceedings of the 4th International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2019. Haliyo, S., Sill, A., Zhou, Q., Kallio, P. & Fatikow, S. (eds.). IEEE, 6 p. 8860952

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    183 Downloads (Pure)

  • Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions

    Heikkinen, I., Koutsourakis, G., Wood, S., Vähänissi, V., Castro, F. A. & Savin, H., 27 Aug 2019, SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. AIP Publishing, Vol. 2147. (AIP Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    3 Citations (Scopus)
    139 Downloads (Pure)

  • Technologies for D band links with beam steering functionality

    Lamminen, A., Roux, P., Ala-Laurinaho, J., Säily, J., Moretto, M., Frecassetti, M. G. L. & Ermolov, V., Dec 2019, Proceedings of the 2019 IEEE Asia-Pacific Microwave Conference, APMC 2019. IEEE, p. 84-86 3 p. 9038456

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    5 Citations (Scopus)
    147 Downloads (Pure)

  • Temperature dependence of thermophotonic energy transfer in intracavity structures

    Casado, A., Radevici, I., Sadi, T. & Oksanen, J., 1 Jan 2019, Photonic Heat Engines: Science and Applications. Seletskiy, D. V., Epstein, R. I. & Sheik-Bahae, M. (eds.). SPIE, p. 1-7 109360U. (Proceedings of SPIE; vol. 10936).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    147 Downloads (Pure)

  • Terahertz Emission due to Radiative Decay of Hot 2D Plasmons in AlGaN/GaN Heterojunction

    Shalygin, V. A., Moldavskaya, M. D., Vinnichenko, M. Y., Panevin, V. Y., Maremyanin, K. V., Firsov, D. A., Vorobjev, L. E., Sakharov, A. V., Zavarin, E. E., Arteev, D. S., Lundin, W. V., Korotyeyev, V. V., Suihkonen, S. & Kauppinen, C., 1 Sept 2019, IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE, 8873862. (International Conference on Infrared, Millimeter, and Terahertz Waves).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • 2018

    Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules

    Pasanen, T., Vähänissi, V., Wolny, F., Oehlke, A., Wagner, M., Juntunen, M. A., Heikkinen, I. T. S., Salmi, E., Sneck, S., Vahlman, H., Tolvanen, A., Hyvärinen, J. & Savin, H., 2018, Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition. EU PVSEC, p. 552-556

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

    Open Access
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    175 Downloads (Pure)

  • Metallized Boron-Doped Black Silicon Emitters For Front Contact Solar Cells

    von Gastrow, G., Calle, E., Ortega, P., Alcubilla, R., Daniil, A., Stutz, E. Z., Fontcuberta i Morral, A., Husein, S., Nietzold, T., Bertoni, M. & Savin, H., 2018, 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC) . IEEE, p. 944-947 4 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    160 Downloads (Pure)

  • Process Integration and Reliability of Wafer Level SLID Bonding for Poly-Si TSV capped MEMS

    Vuorinen, V., Ross, G., Viljanen, H., Decker, J. & Paulasto-Krockel, M., 26 Nov 2018, Proceedings of the 2018 7th Electronic System-Integration Technology Conference, ESTC 2018. IEEE, 6 p. 8546398

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    4 Citations (Scopus)
    474 Downloads (Pure)

  • Scaling up the CNC production: Optimising cellulose degradation with gaseous HCI

    Spiliopoulos, P., Knuts, A., Nieminen, K., Johansson, L. S., Enqvist, E., Kontturi, E. & Pääkkönen, T., 1 Jan 2018, International Conference on Nanotechnology for Renewable Materials 2018. TAPPI Press, Vol. 2. p. 758-768 11 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • 2017

    Black silicon n-Type photodiodes with high response over wide spectral range

    Heinonen, J., Juntunen, M. A., Laine, H. S., Vähänissi, V., Repo, P., Dönsberg, T. & Savin, H., 2017, Optical Sensors 2017. SPIE, Vol. 10231. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    3 Citations (Scopus)
    232 Downloads (Pure)

  • Effect of low-temperature annealing on defect causing copper-related light-induced degradation in p-type silicon

    Vahlman, H., Haarahiltunen, A., Kwapil, W., Schön, J., Yli-Koski, M., Inglese, A., Modanese, C. & Savin, H., 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier, Vol. 124. p. 188-196 9 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    1 Citation (Scopus)
    279 Downloads (Pure)

  • Efficient surface passivation of black silicon using spatial atomic layer deposition

    Heikkinen, I., Repo, P., Vähänissi, V., Pasanen, T., Malinen, V. & Savin, H., 21 Sept 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier, Vol. 124. p. 282–287 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    9 Citations (Scopus)
    314 Downloads (Pure)

  • Novel CED-based rheological test to evaluate pulp reactivity

    Ceccherini, S. & Maloney, T., 2017, Advances in Pulp and Paper Research. Oxford: Pulp & Paper Fundamental Research Society, Vol. 2. p. 909-927

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • N-Type induced junction black silicon photodiode for UV detection

    Juntunen, M. A., Heinonen, J., Laine, H. S., Vähänissi, V., Repo, P., Vaskuri, A. & Savin, H., 2017, Integrated Photonics: Materials, Devices, and Applications IV. SPIE, Vol. 10249. 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    10 Citations (Scopus)
    322 Downloads (Pure)

  • Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

    Pasanen, T., Vähänissi, V., Theut, N. & Savin, H., 21 Sept 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier, Vol. 124. p. 307-312 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    31 Citations (Scopus)
    316 Downloads (Pure)
  • 2016

    Experimental investigation of traps in THz Schottky diodes

    Khanal, S., Kiuru, T., Seppä, H., Mallat, J., Piironen, P. & Räisänen, A., 27 Jun 2016, 2016 Global Symposium on Millimeter Waves, GSMM 2016 and ESA Workshop on Millimetre-Wave Technology and Applications. IEEE, 7500306

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • Long-term stability of Al2O3 passivated black silicon

    Calle, E., Ortega, P., von Gastrow, G., Martin, I., Savin, H. & Alcubilla, R., 2016, Proceedings of the 6th International Conference on Crystalline Silicon Photovoltaics (SiliconPV 2016). Elsevier, Vol. 92. p. 341-346 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    14 Citations (Scopus)
    127 Downloads (Pure)

  • Suitability of roll-to-roll reverse offset printing for mass production of millimeter-wave antennas: progress report

    Räisänen, A., Ala-Laurinaho, J., Asadchy, V., Diaz Rubio, A., Khanal, S., Semkin, V., Tretyakov, S., Wang, X., Zheng, J., Alastalo, A., Mäkelä, T. & Sneck, A., Nov 2016, 2016 Loughborough Antennas & Propagation Conference (LAPC). IEEE, p. 300-304 5 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    7 Citations (Scopus)
    58 Downloads (Pure)
  • 2014

    Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

    Karvonen, L., Alasaarela, T., Jussila, H., Mehravar, S., Chen, Y., Säynätjoki, A., Norwood, R. A., Peyghambarian, N., Kieu, K., Honkanen, S. & Lipsanen, H., 2014, Optical Components and Materials XI. Digonnet, M. & Jiang, S. (eds.). SPIE, p. 1-9 9 p. 89820O. (PRoceedings of SPIE; vol. 8982).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Open Access
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    7 Citations (Scopus)
    31 Downloads (Pure)

  • Radiation detectors fabricated on high-purity GaAs epitaxial materials

    Wu, X., Kostamo, P., Gädda, A., Nenonen, S., Riekkinen, T., Härkönen, J., Salonen, J., Andersson, H., Zhilyaev, Y., Fedorov, L., Eränen, S., Mattila, M., Lipsanen, H., Prunnila, M., Kalliopuska, J. & Oja, A., 2014, 16th International Workshop on Radiation imaging detectors, 2226 June 2014,Trieste, Italy.

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  • 2013

    Dielectric rod waveguide in THz antenna and power sensor applications

    Generalov, A., Lioubtchenko, D., Mallat, J., Ovchinnikov, V. & Räisänen, A., 2013, XXXIII Finnish URSI Convention on Radio Science and SMARAD Seminar, Espoo, Finland, April 24-25, 2013. Wallén, H. & Sihvola, A. (eds.). Espoo, Finland: Aalto University, p. 133-136

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

  • Investigation of uncertainty components in Coulomb blockade thermometry

    Hahtela, O. M., Meschke, M., Savin, A., Gunnarsson, D., Prunnila, M., Penttilä, J. S., Roschier, L., Heinonen, M., Manninen, A. & Pekola, J. P., 2013, TEMPERATURE: ITS MEASUREMENT AND CONTROL IN SCIENCE AND INDUSTRY, VOLUME 8: PROCEEDINGS OF THE NINTH INTERNATIONAL TEMPERATURE SYMPOSIUM. W. Meyer, C. (ed.). American Institute of Physics, Vol. 1552. p. 142-147 6 p. (AIP Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    5 Citations (Scopus)