OtaNano - Nanofab

Facility/equipment: Facility

  • Location

    Tietotie 3

    Micronova

    Espoo

    02150

    Finland

Research Output

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Poster
2019

Atomic layer deposition of piezoelectric aluminum nitride thin films

Österlund, E., Seppänen, H. & Paulasto-Kröckel, M., 16 Jul 2019.

Research output: Contribution to conferencePosterScientific

Efficient passivation of low-reflectance MACE black silicon

Pasanen, T. P., Chen, K., Vähänissi, V. & Savin, H., 10 Apr 2019.

Research output: Contribution to conferencePosterScientific

Growth of Monodisperse DNA Origami-Silica Hybrid Nanostructures

Nguyen, K. & Kuzyk, A., 2019.

Research output: Contribution to conferencePosterScientificpeer-review

2018

Stability of Piezoelectric Al1-xScxN Thin Films

Österlund, E., Ross, G. & Paulasto-Kröckel, M., 15 Jan 2018.

Research output: Contribution to conferencePosterScientific

2017

Comparison of contact and contactless CV for thin film oxide characterization

Pasanen, T., Heinonen, J., Kumar, N., Vähänissi, V., Modanese, C. & Savin, H., 22 May 2017.

Research output: Contribution to conferencePosterScientific