OtaNano - Nanofab

Facility/equipment: Facility

  • Location

    Tietotie 3

    Micronova

    Espoo

    02150

    Finland

Research Output

Filter
Paper
2017

Mechanical properties of ultrathin ALD Al2O3 films

Rontu, V., Hokkanen, A. & Franssila, S., 2017.

Research output: Contribution to conferencePaperScientific

2016

Atomic layer deposition of highly doped Er:Al2O3 and Tm:Al2O3 for silicon-based waveguide amplifiers

Rönn, J., Karvonen, L., Pyymaki-Perros, A., Peyghambarian, N. N., Lipsanen, H., Säynätjoki, A. & Sun, Z., 2016, p. 98910Y. 1 p.

Research output: Contribution to conferencePaperScientific

Fabrication of superomniphobic nanoserif surfaces

Rontu, V., Hoshian, S., Shah, S., Jokinen, V. & Franssila, S., 21 Sep 2016.

Research output: Contribution to conferencePaperScientific

2015

Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition

Rontu, V., Pitkänen, O., Heikkinen, J., Ge, Y., Kordas, K., Franssila, S. & Tuukkanen, S., 22 Jun 2015.

Research output: Contribution to conferencePaperScientific

2014

Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Berdova, M., Rontu, V., Sajavaara, T., Eskelinen, A-P. & Franssila, S., 12 May 2014.

Research output: Contribution to conferencePaperScientific