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  • 2024

    Wide-spectral absorption of femtosecond laser textured germanium

    Liu, X. & Halmela, J., 2024, (Accepted/In press) Proceedings of the 7th International Conference on Optics, Photonics and Lasers (OPAL' 2024). International Frequency Sensor Association (IFSA)

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 2023

    Improved QE in CMOS image sensors with nano-black antireflection layer

    Prest, M. J., Setälä, O., Stefanov, K. D., Vähänissi, V., Savin, H. & Jordan, D., 22 May 2023, 2023 International Image Sensor Workshop Proceedings.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Spatial uniformity of black silicon induced junction photodiode responsivity

    Heinonen, J., Haarahiltunen, A., Vähänissi, V., Pasanen, T. P., Savin, H., Toivanen, J. & Juntunen, M. A., 14 Mar 2023, Optical Components and Materials XX. Jiang, S. & Digonnet, M. J. (eds.). SPIE, 7 p. 1241713. (Proceedings of SPIE : the International Society for Optical Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    20 Downloads (Pure)
  • 2022

    Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes

    Heinonen, J., Haarahiltunen, A., Vähänissi, V., Pasanen, T. P., Savin, H. & Juntunen, M. A., 4 Mar 2022, Optical Components and Materials XIX. SPIE, Vol. 11997. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    3 Citations (Scopus)
    54 Downloads (Pure)
  • Low-temperature die attach for power components: Cu-Sn-In solid-liquid interdiffusion bonding

    Emadi, F., Liu, S., Klami, A., Tiwary, N., Vuorinen, V. & Paulasto-Krockel, M., 2022, ASDAM 2022 - Proceedings: 14th International Conference on Advanced Semiconductor Devices and Microsystems. Marek, J., Donoval, D. & Vavrinsky, E. (eds.). IEEE, 6 p. (Conference proceedings (International conference on advanced semiconductor devices and microsystems)).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    2 Citations (Scopus)
    12 Downloads (Pure)
  • 2021

    Improved stability of black silicon detectors using aluminum oxide surface passivation

    Heinonen, J., Haarahiltunen, A., Kettunen, H., Jaatinen, J., Rossi, M., Heino, J., Savin, H. & Juntunen, M., 11 Jun 2021, International Conference on Space Optics: ICSO 2020. SPIE, Vol. 11852. p. 118520T 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    2 Citations (Scopus)
    44 Downloads (Pure)
  • Low-temperature Metal Bonding for Optical Device Packaging

    Golim, O., Vuorinen, V., Tiwary, N., Ross, G. & Paulasto-Kröckel, M., 13 Nov 2021, Proceedings of 23rd European Microelectronics and Packaging Conference & Exhibition, EMPC 2021. IEEE, 4 p.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    4 Citations (Scopus)
    162 Downloads (Pure)
  • Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes

    Heinonen, J., Haarahiltunen, A., Serue, M., Kriukova, D., Vähänissi, V., Pasanen, T. P., Savin, H. & Juntunen, M. A., 5 Mar 2021, Optical Components and Materials XVIII. SPIE, Vol. 11682. 6 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    304 Downloads (Pure)
  • 2020

    Black silicon boron emitter solar cells with EQE above 95% in UV

    Chen, K., Vähänissi, V., Rad, Z. J., Lehtio, J. P., Laukkanen, P., Yli-Koski, M. & Savin, H., 2020, Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020. IEEE, p. 2586-2589 4 p. 9300686. (Conference record of the IEEE Photovoltaic Specialists Conference).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)
  • Can hydrogenation mitigate Cu-induced bulk degradation in silicon?

    Heikkinen, I. T. S., Wright, B., Soeriyadi, A. H., Yli-Koski, M., Kim, M., Vähänissi, V., Hallam, B. J. & Savin, H., 2020, Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020. IEEE, p. 2582-2585 4 p. 9300619

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    80 Downloads (Pure)
  • Distinction of the thermoelectric effect in graphene FET THz detectors

    Generalov, A. A., Ludwig, F., Ahmadi, M., Bonmann, M., Vorobiev, A., Soikkeli, M., Arpiainen, S., Prunnila, M., Stake, J., Roskos, H. G. & Sun, Z., 8 Nov 2020, 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE, p. 504-505 2 p. 9370957. (International Conference on Infrared, Millimeter, and Terahertz Waves).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)
  • High-sensitivity NIR photodiodes using black silicon

    Heinonen, J., Haarahiltunen, A., Serue, M., Vähänissi, V., Pasanen, T., Savin, H., Werner, L. & Juntunen, M., 2020, Optical Components and Materials XVII. SPIE, Vol. 11276. 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    5 Citations (Scopus)
    275 Downloads (Pure)
  • MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulator Structure

    Ross, G., Luntinen, V., Broas, M., Suihkonen, S., Tuomi, T., Lankinen, A., Danilewsky, A., Tilli, M. & Paulasto-Kröckel, M., 15 Sept 2020, Proceedings - 2020 IEEE 8th Electronics System-Integration Technology Conference, ESTC 2020. IEEE, 6 p. 9229836

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    1 Citation (Scopus)
    165 Downloads (Pure)
  • 2019

    A Sensor Interface for Neurochemical Signal Acquisition

    Olabode, O., Kosunen, M., Unnikrishnan, V., Palomaki, T., Laurila, T., Halonen, K. & Ryynanen, J., 1 Aug 2019, 2019 IEEE 62nd International Midwest Symposium on Circuits and Systems, MWSCAS 2019. IEEE, p. 390-393 4 p. 8885019. (Conference proceedings : Midwest Symposium on Circuits and Systems).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    1 Citation (Scopus)
    179 Downloads (Pure)
  • Low-T anneal as cure for LeTID in Mc-Si PERC cells

    Yli-Koski, M., Pasanen, T. P., Heikkinen, I., Serué, M. & Savin, H., 27 Aug 2019, SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. 1 ed. AIP Publishing, Vol. 2147. (AIP Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    5 Citations (Scopus)
    107 Downloads (Pure)
  • Observation of local electroluminescent cooling and identifying the remaining challenges

    Radevici, I., Sadi, T., Tripurari, T., Tiira, J., Ranta, S., Tukiainen, A., Guina, M. & Oksanen, J., 1 Jan 2019, Photonic Heat Engines: Science and Applications. Seletskiy, D. V., Epstein, R. I. & Sheik-Bahae, M. (eds.). SPIE, 109360A. (Proceedings of SPIE; vol. 10936).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    216 Downloads (Pure)
  • Rapid mode-switching for acoustic manipulation

    Latifi, K., Kopitca, A. & Zhou, Q., 1 Jul 2019, Proceedings of the 4th International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2019. Haliyo, S., Sill, A., Zhou, Q., Kallio, P. & Fatikow, S. (eds.). IEEE, 6 p. 8860952

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    165 Downloads (Pure)
  • Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions

    Heikkinen, I., Koutsourakis, G., Wood, S., Vähänissi, V., Castro, F. A. & Savin, H., 27 Aug 2019, SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. AIP Publishing, Vol. 2147. (AIP Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    3 Citations (Scopus)
    132 Downloads (Pure)
  • Temperature dependence of thermophotonic energy transfer in intracavity structures

    Casado, A., Radevici, I., Sadi, T. & Oksanen, J., 1 Jan 2019, Photonic Heat Engines: Science and Applications. Seletskiy, D. V., Epstein, R. I. & Sheik-Bahae, M. (eds.). SPIE, p. 1-7 109360U. (Proceedings of SPIE; vol. 10936).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    123 Downloads (Pure)
  • Terahertz Emission due to Radiative Decay of Hot 2D Plasmons in AlGaN/GaN Heterojunction

    Shalygin, V. A., Moldavskaya, M. D., Vinnichenko, M. Y., Panevin, V. Y., Maremyanin, K. V., Firsov, D. A., Vorobjev, L. E., Sakharov, A. V., Zavarin, E. E., Arteev, D. S., Lundin, W. V., Korotyeyev, V. V., Suihkonen, S. & Kauppinen, C., 1 Sept 2019, IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE, 8873862. (International Conference on Infrared, Millimeter, and Terahertz Waves).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 2018

    Electroluminescent cooling using double diode structures

    Sadi, T., Radevici, I., Kivisaari, P., Casado, A. & Oksanen, J., 7 Dec 2018, 18th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2018. Piprek, J. & Djurisic, A. B. (eds.). IEEE, Vol. 2018-November. p. 125-126 2 p. 8570294

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
  • Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules

    Pasanen, T., Vähänissi, V., Wolny, F., Oehlke, A., Wagner, M., Juntunen, M. A., Heikkinen, I. T. S., Salmi, E., Sneck, S., Vahlman, H., Tolvanen, A., Hyvärinen, J. & Savin, H., 2018, Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition. EU PVSEC, p. 552-556

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Open Access
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    161 Downloads (Pure)
  • Metallized Boron-Doped Black Silicon Emitters For Front Contact Solar Cells

    von Gastrow, G., Calle, E., Ortega, P., Alcubilla, R., Daniil, A., Stutz, E. Z., Fontcuberta i Morral, A., Husein, S., Nietzold, T., Bertoni, M. & Savin, H., 2018, 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC) . IEEE, p. 944-947 4 p.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    147 Downloads (Pure)
  • One-antenna gain measurement in a probe station

    Ala-Laurinaho, J., Zheng, J. & Raisanen, A. V., 9 Nov 2018, 2018 IEEE Conference on Antenna Measurements and Applications, CAMA 2018. IEEE, 8530553

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    2 Citations (Scopus)
    232 Downloads (Pure)
  • Roll-to-roll reverse offset printing of millimeter-wave transmission lines and antennas on flexible substrates

    Zheng, J., Ala-Laurinaho, J., Sneck, A., Mäkelä, T., Alastalo, A. & Räisänen, A. V., 10 Dec 2018, 12th European Conference on Antennas and Propagation (EuCAP 2018). European Association on Antennas and Propagation (EurAAP), 4 p.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    1 Citation (Scopus)
    235 Downloads (Pure)
  • 2017

    Black silicon n-Type photodiodes with high response over wide spectral range

    Heinonen, J., Juntunen, M. A., Laine, H. S., Vähänissi, V., Repo, P., Dönsberg, T. & Savin, H., 2017, Optical Sensors 2017. SPIE, Vol. 10231. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    3 Citations (Scopus)
    215 Downloads (Pure)
  • Effect of low-temperature annealing on defect causing copper-related light-induced degradation in p-type silicon

    Vahlman, H., Haarahiltunen, A., Kwapil, W., Schön, J., Yli-Koski, M., Inglese, A., Modanese, C. & Savin, H., 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier BV, Vol. 124. p. 188-196 9 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    1 Citation (Scopus)
    270 Downloads (Pure)
  • Efficient surface passivation of black silicon using spatial atomic layer deposition

    Heikkinen, I., Repo, P., Vähänissi, V., Pasanen, T., Malinen, V. & Savin, H., 21 Sept 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier BV, Vol. 124. p. 282–287 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    8 Citations (Scopus)
    298 Downloads (Pure)
  • Intracavity double diode structures with GaInP barrier layers for thermophotonic cooling

    Tiira, J., Radevici, I., Haggren, T., Hakkarainen, T., Kivisaari, P., Lyytikäinen, J., Aho, A., Tukiainen, A., Guina, M. & Oksanen, J., 2017, Optical and Electronic Cooling of Solids II. SPIE, p. 1-7 1012109. ( Proceedings of SPIE; vol. 10121).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    3 Citations (Scopus)
    75 Downloads (Pure)
  • Irregular arrays of metal-shell nanocylinders for metamaterial applications

    Ovchinnikov, V., 14 Sept 2017, Proceedings of International Conference on Metamaterials and Nanophotonics, METANANO 2017. American Institute of Physics, Vol. 1874. 040036

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Key parameters influencing Cu-Sn interfacial void formation

    Ross, G., Vuorinen, V. & Paulasto-Kröckel, M., 23 Feb 2017, Proceedings of the 18th IEEE Electronics Packaging Technology Conference, EPTC 2016. IEEE, p. 459-467 9 p. (Electronics Packaging Technology Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    1 Citation (Scopus)
  • Lasing in small-sized aluminum nanoparticle arrays

    Rekola, H. T., Hakala, T. K. & Törmä, P., 2017, Metamaterials, Metadevices, and Metasystems 2017. Engheta, N., Noginov, M. A. & Zheludev, N. I. (eds.). SPIE, p. 1-7 7 p. 103432E. (Proceedings of SPIE; vol. 10343).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    148 Downloads (Pure)
  • Lock-in thermography approach for imaging the efficiency of light emitters and optical coolers

    Radevici, I., Tiira, J. & Oksanen, J., 2017, Optical and Electronic Cooling of Solids II. Epstein, R. I., Seletskiy, D. V. & Sheik-Bahae, M. (eds.). SPIE, p. 1-7 7 p. 101210Q. (Proceedings of SPIE; vol. 10121).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    5 Citations (Scopus)
    27 Downloads (Pure)
  • Low temperature and high quality atomic layer deposition HfO2 coatings

    Perros, A. P., Sippola, P., Arduca, E., Johansson, L. S. & Lipsanen, H., 26 Jul 2017, 2017 IMAPS Nordic Conference on Microelectronics Packaging, NordPac 2017. IEEE, p. 182-185 4 p. 7993189

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)
  • Multi-particle acoustic manipulation on a Chladni plate

    Latifi, K., Wijaya, H. & Zhou, Q., 17 Jul 2017, Proceedings of the IEEE International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017. IEEE, p. 1-7 7 p.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
    File
    9 Citations (Scopus)
    432 Downloads (Pure)
  • N-Type induced junction black silicon photodiode for UV detection

    Juntunen, M. A., Heinonen, J., Laine, H. S., Vähänissi, V., Repo, P., Vaskuri, A. & Savin, H., 2017, Integrated Photonics: Materials, Devices, and Applications IV. SPIE, Vol. 10249. 7 p. (SPIE Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    8 Citations (Scopus)
    283 Downloads (Pure)
  • Organic semiconductor rubrene thin films deposited by pulsed laser evaporation of solidified solutions

    Majewska, N., Gazda, M., Jendrzejewski, R., Majumdar, S., Sawczak, M. & Śliwiński, G., 1 Jan 2017, Third International Conference on Applications of Optics and Photonics. SPIE, p. 1-9 9 p. 104532H. (Proceedings of SPIE; vol. 10453).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
    11 Downloads (Pure)
  • Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

    Pasanen, T., Vähänissi, V., Theut, N. & Savin, H., 21 Sept 2017, 7th International Conference on Silicon Photovoltaics, SiliconPV 2017. Elsevier BV, Vol. 124. p. 307-312 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    29 Citations (Scopus)
    303 Downloads (Pure)
  • 2016

    Design for reliability of Au-Sn and Cu-Sn based SLID bonds

    Vuorinen, V., Rautiainen, A. & Paulasto-Kröckel, M., 25 Jan 2016, 20th European Microelectronics and Packaging Conference and Exhibition. IEEE, 6 p. 7390735

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon

    Repo, P. & Savin, H., 2016, Proceedings of the 6th International Conference on Crystalline Silicon Photovoltaics (SiliconPV 2016). Elsevier BV, Vol. 92. p. 381-385 5 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    15 Citations (Scopus)
    156 Downloads (Pure)
  • Enhancement of the photoluminescence in Er-doped Al2O3 fabricated by atomic layer deposition

    Rönn, J., Karvonen, L., Pyymäki-Perros, A., Peyghambarian, N., Lipsanen, H., Säynätjoki, A. & Sun, Z., 2016, Integrated Optics: Devices, Materials, and Technologies XX. Broquin, J-E. & Conti, G. N. (eds.). SPIE, Vol. 9750. 8 p. 97500P. (SPIE conference proceedings; vol. 9750).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
  • Experimental study of carrier density tuning in epitaxial graphene QHR devices

    Fletcher, N., Gournay, P., Rolland, B., Gotz, M., Novikov, S., Lebedeva, N. & Satrapinski, A., 10 Aug 2016, CPEM 2016 - Conference on Precision Electromagnetic Measurements, Conference Digest. IEEE, 2 p. 7540515. (Conference on precision electromagnetic measurements).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
  • Finite- vs. infinite-source emitters in silicon photovoltaics: Effect on transition metal gettering

    Laine, H. S., Vähänissi, V., Liu, Z., Huang, H., Magana, E., Morishige, A. E., Khelifati, N., Husein, S., Lai, B., Bertoni, M., Bouhafs, D., Buonassisi, T., Fenning, D. P. & Savin, H., 18 Nov 2016, Proceedings of the 43rd IEEE Photovoltaic Specialists Conference (PVSC). IEEE, p. 678-680 3 p. 7749686

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)
  • Long-term stability of Al2O3 passivated black silicon

    Calle, E., Ortega, P., von Gastrow, G., Martin, I., Savin, H. & Alcubilla, R., 2016, Proceedings of the 6th International Conference on Crystalline Silicon Photovoltaics (SiliconPV 2016). Elsevier BV, Vol. 92. p. 341-346 6 p. (Energy Procedia).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Open Access
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    14 Citations (Scopus)
    122 Downloads (Pure)
  • Novel nanostructure replication process for robust superhydrophobic surfaces

    Hoshian, S., Jokinen, V. & Franssila, S., 26 Feb 2016, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 547-549 3 p.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)
  • Silicon surface passivation with atomic layer deposited aluminum nitride

    Repo, P., Bao, Y., Seppänen, H., Sippola, P. & Savin, H., 18 Nov 2016, Proceedings of the IEEE 43rd Photovoltaic Specialists Conference (PVSC). IEEE, p. 2967-2970 4 p. 7750205

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)
  • 2015

    Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone

    Broas, M., Li, J., Liu, X., Ge, Y., Peltonen, A., Mattila, T. T. & Paulasto-Krockel, M., 2015, Electronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015. IEEE, p. 453-459

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    4 Citations (Scopus)
  • 2014

    Toward efficient graphene fabrication and ultrafast characterization

    Riikonen, J., Kim, K., Li, C., Säynätjoki, A., Karvonen, L. & Lipsanen, H., 2014, MRS Spring 2014, San Francisco, California, USA, April 21-25, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

  • 2013

    Calibration of high aspect ratio quality control optical scanning system

    Karadzhinova, A., Hilden, T., Heino, J., Berdova, M., Lauhakangas, R., Garcia, F., Tuominen, E. & Kassamakov, I., 2013, DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS II. Harding, KG., Huang, PS. & Yoshizawa, T. (eds.). SPIE, 9 p. 88390G. (Proceedings of SPIE; vol. 8839).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
  • Dielectric rod waveguide in THz antenna and power sensor applications

    Generalov, A., Lioubtchenko, D., Mallat, J., Ovchinnikov, V. & Räisänen, A., 2013, XXXIII Finnish URSI Convention on Radio Science and SMARAD Seminar, Espoo, Finland, April 24-25, 2013. Wallén, H. & Sihvola, A. (eds.). Espoo, Finland: Aalto University, p. 133-136

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific