Research output per year
Research output per year
Equipments Details
Description
Micronova is the largest research cleanroom in Nordic countries with 2600 m2 of ISO 4–ISO 6/class 10 – 1000 space, including VTT pilot facility on M1-side and Aalto Nanofab & VTT joint operations in M2-side.
Cleanroom offers more than 380 tools ranging from advanced nanolithogprahy to various thin-film deposition and etching processes. Services include training academic and company users to cleanroom safety and independent process tool access. In addition, VTT offers operator batch production services, as well as advanced component technology process platforms for quantum- and sensing devices.
Cleanroom offers more than 380 tools ranging from advanced nanolithogprahy to various thin-film deposition and etching processes. Services include training academic and company users to cleanroom safety and independent process tool access. In addition, VTT offers operator batch production services, as well as advanced component technology process platforms for quantum- and sensing devices.
Details
| Name | OtaNano - Nanofab |
|---|---|
| Acquisition date | 01/01/2013 |
Fingerprint
Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.
Research output
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(oral talk) Nanostructured photodiodes for improved sensitivity over wide spectral range
Savin, H., Setälä, O., Vähänissi, V., Leiviskä, O., Terletskaia, M., Isometsä, J. & Viuho, J., 8 Jul 2026.Research output: Contribution to conference › Abstract › Scientific › peer-review
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(poster) Detection of nuclei for oxidation induced stacking faults
Sutinen, K., Golovleva, M., Salminen, J. & Savin, H., 3 Apr 2026, (Accepted/In press).Research output: Contribution to conference › Abstract › Scientific › peer-review
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(poster) Implementation of black silicon CCD for astronomical observations at the Nordic Optical Telescope
Kuncarayakti, H., Savin, H., Viuho, J., Bredthauer, G., Leiviskä, O., Mattila, S., Setälä, O., Tufts, J., Vähänissi, V. & Väisänen, P., 9 Jul 2026.Research output: Contribution to conference › Abstract › Scientific › peer-review
Datasets
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Dataset for "Highly strained Ge nanostructures and direct bandgap transition induced by femtosecond laser"
Liu, X. (Creator), Zenodo, 25 Mar 2025
DOI: 10.5281/zenodo.15082447, https://zenodo.org/records/15082448
Dataset
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Measurement and simulation of optical properties of nanostructured silicon heavily implanted with selenium
Radfar, B. (Creator), Liu, X. (Contributor), Berencen, Y. (Contributor), Shaikh, M. S. (Contributor), Prucnal, S. (Contributor), Kentsch, U. (Contributor), Vähänissi, V. (Contributor), Zhou, S. (Contributor) & Savin, H. (Contributor), Zenodo, 13 May 2024
DOI: 10.5281/zenodo.10522962, https://zenodo.org/records/10522963
Dataset
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Sub-picosecond thermalization dynamics in condensation of strongly coupled lattice plasmons
Väkeväinen, A. (Creator), Moilanen, A. (Creator), Nečada, M. (Creator), Hakala, T. K. (Creator), Daskalakis, K. (Creator) & Törmä, P. (Creator), Zenodo, 17 Jun 2020
Dataset
Activities
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Surface Passivation of Black Germanium for Interdigitated Back Contact Thermophotovoltaic Cell
Gamel, M. (Speaker), Rivera, G. (Contributor), López, G. (Contributor), Terletskaia, M. (Contributor), Liu, H. (Contributor), Vähänissi, V. (Contributor), Savin, H. (Contributor), Garin, M. (Contributor) & Martin, I. (Contributor)
22 Sept 2025 → 26 Sept 2025Activity: Talk or presentation types › Conference presentation
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Hyperdoping germanium with titanium via femtosecond laser processing
Liu, X. (Speaker), Gnatyuk, D. (Contributor), Vähänissi, V. (Contributor) & Savin, H. (Contributor)
17 Sept 2024Activity: Talk or presentation types › Conference presentation
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Wide-spectral absorption of femtosecond laser textured germanium
Liu, X. (Speaker) & Halmela, J. (Contributor)
14 May 2024 → 16 May 2024Activity: Talk or presentation types › Conference presentation
Press/Media
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Using laser processed glass as solar concentrators for BIPV
09/04/2025
1 Media contribution
Press/Media: Media appearance
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Electron Physics group embraces open data
02/04/2024
1 item of Media coverage
Press/Media: Media appearance
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Suomessa käynnistyy kymmenen miljoonan euron kvanttiteknologian tutkimushanke – Business Finland mukana rahoittamassa
18/01/2022
1 item of Media coverage
Press/Media: Media appearance
Prizes
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35th EU PVSEC 2018 Student Award
Pasanen, T. (Recipient), Savin, H. (Supervising professor) & Vähänissi, V. (Advisor), 28 Sept 2018
Prize: Award or honor granted for a specific work
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3RD PLACE WINNER AT SCIENCE IN VIDEO (SCIVID) COMPETITION (MRS FALL 2018)
Khayrudinov, V. (Recipient), 28 Nov 2018
Prize: Award or honor granted for a specific work
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QTF Annual Discovery Prize 2020
Karimi, B. (Recipient), 2020
Prize: Award or honor granted for a specific work