Facility/equipment: Facility

  • LocationShow on map

    Micronova (Nanofabrication): Tietotie 3; Nano Building (Nanomicroscopy Center and Low Temperature Laboratory): Puumiehenkuja 2B




Equipments Details


OtaNano is a national research infrastructure focusing on competitive research in nanoscience and -technology, and in quantum technologies.

OtaNano offers a wide variety of fabrication processes and equipment for micro- and nanostructures. The facilities cover a comprehensive range of imaging and characterisation equipment, including electron microscopy, nanomicroscopy, and x-ray scattering devices. Other key operations include ultra-low-temperature conductivity and high-frequency measurements.

OtaNano is a top-level learning environment for young researchers and an international centre for scientific research. The facilities are important for scientists as well as for high-tech companies working with micro- and nano-technology applications. OtaNano is a national platform to develop innovative enabling technologies and apply them to practical micro- and nano-systems.

OtaNano is an open access research infrastructure, operated by Aalto University and VTT, and is available for academic and commercial users internationally.

OtaNano provides state-of-the-art capabilities in the fabrication, structural characterization and measurements of nanometer-scale structures and devices in a unique working environment for this research in Finland. It is at the forefront of developing new micro/nanofabrication techniques and it enables scientific excellence in carefully selected focus areas: quantum technology and nanoelectronics, micro- and nanophotonics, nanostructured materials, MEMS and microsystems.


Acquisition date01/01/2013


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