Dataset for Challenges in Simultaneous Microstructuring and Hyperdoping of Germanium with Ultrafast Laser

Dataset for Challenges in Simultaneous Microstructuring and Hyperdoping of Germanium with Ultrafast LaserManuscript ID: pssa.202500987Article type: PerspectiveDOI: 10.1002/pssa.202500987Publication: physica status solidi (a) applications and materials science

OverviewThis dataset contains the raw and processed data underlying all main-text and Supplementary figures of the associated manuscript. The data are organized into separate files according to measurement technique. Within each file, worksheets correspond to specific figures or data subsets as indicated.Unless otherwise stated, raw data are provided in good faith and to the best of the authors’ knowledge accurately reflect the recorded measurements. Processed data used for figure generation (e.g., averaging, normalization, baseline subtraction, or smoothing) are included alongside the raw data to ensure transparency and reproducibility.

Absorptance.xlsxAbsorptance.xlsx contains the spectroscopic data underlying Figure 1b and Figure S1 of the manuscript. Total reflectance and total transmittance spectra were measured using an Agilent Cary 5000 UV–Vis–NIR spectrophotometer. The file is organized into separate worksheets for measured and derived quantities.The worksheet “R” provides raw total reflectance measured from 2500 to 1500 nm with a 1 nm step. Below 1500 nm, reflectance is not experimentally accessible under the present configuration and is therefore taken as zero in the absorptance calculation. The worksheet “T” provides raw total transmittance measured from 2500 to 250 nm with a 1 nm step. Wavelength is given in nanometres and reflectance and transmittance are reported in %. The worksheet “A” contains total absorptance calculated as A(λ) = 1 − R(λ) − T(λ) directly from the measured data. The worksheet “Figure1b” and "FigureS1" contains the 1900–2500 nm spectral window used to generate Figure 1b and FigureS1, respectively. Absorptance smoothing was performed in Origin using adjacent averaging (window = 50 points, weighted average off, boundary condition reflect) for visualization only as minor point-to-point fluctuations may reduce visual clarity.

Raman.xlsxRaman.xlsx contains all Raman spectroscopy data underlying Figure 2(b,c) and Figure S3(a,b) of the manuscript. Raman measurements were performed using a WITec alpha300 RA+ system with 532 nm excitation and a 50× objective lens. The file includes both raw and processed spectra.The worksheet “Ti coated Ge” contains all raw spectra measured from the initial Ti-coated Ge samples. Each sample was measured multiple times to ensure reproducibility. The worksheet “Bare Ge” contains all raw spectra measured from the initial bare Ge samples. The worksheet “Background” contains a single spectrum acquired with the excitation light switched off, used for background subtraction.The worksheet “Figure2bc” contains the statistical results presented in Figure 2b and Figure 2c. The worksheets “FigureS3a” and “FigureS3b” contain the spectra (only one characteristic spectrum is chosen for each processing condition) presented in Figure S3a and Figure S3b, respectively. Spectra shown in these figures are normalized to the main Ge Raman peak. Raw spectra prior to normalization are retained in the corresponding raw-data worksheets.

XPS.xlsxXPS.xlsx contains raw X-ray photoelectron spectroscopy (XPS) data for the four samples described in the manuscript. For each sample, measurements were performed at five randomly selected positions using a 300 µm spot size. At each position, spectra were acquired with ten accumulations and averaged by the instrument.The worksheets “Ti2p”, “Ti3p”, and “Ge2p” correspond to the spectra presented in Figure 2e, Figure S4a, and Figure S4b, respectively. The spectra used to generate these figures were obtained by averaging the five positional measurements for each sample, followed by baseline subtraction. Raw spectra prior to averaging and baseline correction are retained in the file.

XRD.xlsxXRD.xlsx contains the X-ray diffraction (XRD) spectra underlying Figure 2d of the manuscript. The spectra are provided in their original measured form without post-processing.Addtionally, the worksheets “Ti coated Ge” and “Bare Ge” include all raw XRD spectra acquired from Ge samples with and without Ti coating after each processing step, including rapid thermal annealing (RTA) at temperatures between 400 and 600 °C. The data are presented as measured.

SEM.7zSEM.7z contains the scanning electron microscopy (SEM) images underlying Figure 2a and Figure S2 of the manuscript. Images are provided in TIFF format (1024 × 768 pixels) and were acquired using a ZEISS SUPRA 40 scanning electron microscope.Acquisition metadata, including scale bar, accelerating voltage (EHT), and date and time of capture, are embedded directly within the image files. The images are provided in their original resolution without modification.

LicenseThis dataset is licensed under the Creative Commons Attribution 4.0 International (CC BY 4.0). Users are free to share and adapt the material for any purpose, provided appropriate credit is given to the original authors and the associated publication.