CCDC 253458: Experimental Crystal Structure Determination

  • Jenni Harjuoja (Contributor)
  • Matti Putkonen (Creator)
  • Eero Rauhala (Contributor)
  • Mikko Ritala (Contributor)

    Dataset

    Research Output

    2005

    New approach to ALD of bismuth silicates; Bi(CH2SiMe3)3 acting as a precursor for both bismuth and silicon

    Harjuoja, J., Hatanpää, T., Vehkamäki, M., Väyrynen, S., Putkonen, M., Niinistö, L., Ritala, M., Leskelä, M. & Rauhala, E., 2005, In : Chemical Vapor Deposition. 11, p. 362-367

    Research output: Contribution to journalArticleScientificpeer-review

    16 Citations (Scopus)