Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Press/Media: Media appearance

Period	11 Aug 2023

Media coverage

Title	Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
Media name/outlet	Aaltodoc
Country/Territory	Finland
Date	11/08/2023
URL	ct.moreover.com/?a=51520865689&p=1gw&v=1&x=zvZK2lPMNqH4nDGFF61v0w
Persons	Markku Sopanen