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ALD Stories Episode 14, Back to basics: Understanding conformality with Riikka Puurunen

Press/Media: Media appearance

Description

Back for her second episode, Professor Riikka Puurunen is bringing us back to the basics with a deep dive on conformality. Recorded live from the Harald Herlin Learning Center at Aalto University, Tyler and Riikka talk about the all-important property of ALD. In this episode, Riikka explains the history of conformality in ALD, her recent paper on modeling collaboration, the origins of the PillarHall conformality test structures and a conversation on open science.

Period30 Jun 2022

Media contributions

1

Media contributions

  • TitleBack to Basics: Understanding Conformality with Riikka Puurunen
    Degree of recognitionInternational
    Media name/outletALD Stories
    Media typeWeb
    Duration/Length/Size1 h 5 min
    Country/TerritoryFinland
    Date30/06/2022
    DescriptionBack for her second episode, Professor Riikka Puurunen is bringing us back to the basics with a deep dive on conformality. Recorded live from the Harald Herlin Learning Center at Aalto University, Tyler and Riikka talk about the all-important property of ALD. In this episode, Riikka explains the history of conformality in ALD, her recent paper on modeling collaboration, the origins of the PillarHall conformality test structures and a conversation on open science.

    In this episode:

    00:00 Intro

    03:39 History of conformality

    10:21 Has our understanding of conformality changed?

    12:25 Is conformality an inherent property?

    18:38 Conformality modeling findings

    37:28 PillarHall Test Structures

    49:35 Open Learning for ALD

    Follow Riikka at @rlpuu on Twitter
    Producer/AuthorTyles Myers, Beneq
    URLhttps://beneq.com/en/podcast/podcast-1/
    PersonsRiikka Puurunen
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Keywords

  • atomic layer deposition
  • ALD OpenLearning
  • Virtual Project on the History of ALD