ALD Russia 2015 workshop: travel notes by Riikka Puurunen

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Tavel report from the ALD Russia workshop in Dolgoprudny, Moscow region, September 2015. 

Period19 Nov 2015

Media contributions


Media contributions

  • TitleALD Russia 2015 workshop: travel notes by Riikka Puurunen
    Degree of recognitionInternational
    Media name/outletALD History Blog
    Media typeWeb
    DescriptionThe Atomic Layer Deposition Russia 2015 (“ALD Russia”, in short) workshop was organized by Moscow Institute of Physics and Technology (MIPT), in Dolgoprudny, Moscow region, on September 21-23, 2015. The chairman of the workshop was Anatoly Malygin from St. Petersburg Technological Institute; Dr. Andrey Zenkevich and Dr. Andrey Markeev from MIPT were in charge of the local organizing committee. The workshop was opened by the rector of MIPT, corresponding member of RAS, professor Nikolay Kudryavtsev. According to the organizers, 67 people were registered to attend the workshop.

    Invited speakers at the workshop were: Anatoly Malygin (St. Petersburg Technological University, Russia), Steven M. George (University of Colorado at Boulder, USA), Gregory N. Parsons (Carolina State University, USA), Riikka Puurunen (VTT Technical Research Centre of Finland), Annelies Delabie (IMEC, Belgium), Hyungjun Kim (Yonsei University, Korea), Cheol Seong Hwang (Seoul National University, Korea), Robert M. Wallace (University of Texas at Dallas, USA), Andrey Markeev (Moscow Institute of Physics and Technology, Russia), Sabina Spiga (Laboratorio MDM, IMM-CNR, Italy), Andrey Zenkevich/Yury Matveev (Moscow Institute of Physics and Technology, Russia), Vladimir Gritsenko (A. V. Rzhanov Institute of Semiconductor Physics of SB RAS, Russia), Ingo Dirnstorfer (NaMLab, Germany), Vladislav Vasilyev (Novosibirsk State Technical University and SibIS LCC, Russia), Giovanna Scarel (James Madison University, USA), Erwin Kessels (Eindhoven University of Technology, The Netherlands), Sean Barry (Carleton University, Canada), Svetlana Dorovskikh (A. V. Nikolaev Institute of Inorganic Chemistry SB RAS), and Evgeny Gornev (Mikron, Russia).

    The scientific programme of the workshop was a balanced mixture of various subject areas, ...
    Producer/AuthorRiikka Puurunen
    PersonsRiikka Puurunen