Passivation of detector-grade Fz-Si with atomic layer deposited aluminium oxide

Pasanen, T. (Speaker), Ott, J. (Contributor), Repo, P. (Contributor), Seppänen, H. (Contributor), Vähänissi, V. (Contributor), Savin, H. (Contributor)

Activity: Talk or presentation typesConference presentation

Period23 Sep 2019
Event titleConference on Gettering and Defect Engineering in Semiconductor Technology
Event typeConference
Conference number18
LocationZeuthen, Germany
Degree of RecognitionInternational