JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (Journal)

Activity: Publication peer-review and editorial work typesReviewer of scientific journal

Kirill Isakov - Reviewer

Description

Review of article 'X-ray scattering techniques for characterizing optical properties of TiO2 and Al2O3 antireflection coatings', which was later published as 'Grazing-incidence small angle x-ray scattering, x-ray reflectivity, and atomic force microscopy: A combined approach to assess atomic-layer-deposited Al2O3 dielectric films'
4 Oct 201725 Oct 2017

ID: 21204842