Journal of Vacuum Science and Technology A (Journal)

  • Kirill Isakov (Reviewer)

Activity: Publication peer-review and editorial work types › Reviewer of scientific journal

Description

Review of article 'X-ray scattering techniques for characterizing optical properties of TiO2 and Al2O3 antireflection coatings', which was later published as 'Grazing-incidence small angle x-ray scattering, x-ray reflectivity, and atomic force microscopy: A combined approach to assess atomic-layer-deposited Al2O3 dielectric films'
Period4 Oct 2017 → 25 Oct 2017
Type of journalJournal
ISSN0734-2101
Degree of RecognitionInternational