Investigation of PEALD SiO2 thin films by rf-GDOES

Zhu, Z. (Contributor), Chiara Modanese (Speaker), Perttu Sippola (Contributor), Marisa Di Sabatino (Contributor), Savin, H. (Contributor)

Activity: Talk or presentation typesConference presentation

Period25 May 2017
Event titleEuropean Materials Research Society Spring Meeting
Event typeConference
LocationStrasbourg, France
Degree of RecognitionInternational

Keywords

  • ALD, SiO2, thin film analysis, GDOES