Investigation of PEALD SiO2 thin films by rf-GDOES

  • Zhen Zhu (Contributor)
  • Chiara Modanese (Speaker)
  • Perttu Sippola (Contributor)
  • Marisa Di Sabatino (Contributor)
  • Savin, H. (Contributor)

Activity: Talk or presentation types › Conference presentation

Period25 May 2017
Event titleEuropean Materials Research Society Spring Meeting
Event typeConference
LocationStrasbourg, FranceShow on map
Degree of RecognitionInternational

Keywords

  • ALD, SiO2, thin film analysis, GDOES