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Investigation of PEALD SiO
2
thin films by rf-GDOES
Zhen Zhu (Contributor)
Chiara Modanese (Speaker)
Perttu Sippola (Contributor)
Marisa Di Sabatino (Contributor)
Savin, H.
(Contributor)
Department of Electronics and Nanoengineering
Electron Physics Group (EPG)
Activity
:
Talk or presentation types
›
Conference presentation
Period
25 May 2017
Event title
European Materials Research Society Spring Meeting
Event type
Conference
Location
Strasbourg, France
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Degree of Recognition
International
Keywords
ALD, SiO2, thin film analysis, GDOES