Investigation of PEALD SiO2 thin films by rf-GDOES

Activity: Talk or presentation typesConference presentation

Zhen Zhu - Contributor

Chiara Modanese - Speaker

Perttu Sippola - Contributor

Marisa Di Sabatino - Contributor

Hele Savin - Contributor

25 May 2017

Event (Conference)

TitleEuropean Materials Research Society Spring Meeting
Abbrev. TitleE-MRS
Period22/05/201726/05/2017
CityStrasbourg
CountryFrance
Degree of recognitionInternational event

ID: 15323452