Description
We present a novel anti-reflective coating from grass-like nanoporous Al2O3 with low refractive index and vertical index profile gradient. Fabrication of the coating includes atomic layer deposition of Al2O3 using thermal trimethylaluminium/water process and immersion of the deposited film in heated deionized water. Average optical transmittance in the range of 350--800 nm was 99.0% at normal incidence for double-side coated glass, the transmittance maximum of 99.5% was achieved at 500 nm. Transmittance spectra were also measured at different incident angles, average transmittance in the 350--800 nm range was 94.0% at 60 deg, 85.0% at 70 deg, and 53.1% at 80 deg incident angles, respectively. The grass-like Al2O3 ARC manufacturing technique is applicable to mass production, as ALD provides a possibility to coat hundreds of optical components at once. Additionally, unlike many other ARC deposition techniques used today (spin-coating, physical vapour deposition), grass-like Al2O3 fabrication is suitable for coating surfaces with extremely complex topography.| Period | 27 Jul 2018 |
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| Event title | IEEE International Conference on Nanotechnology |
| Event type | Conference |
| Conference number | 17th |
| Location | Pittsburgh, United States, PennsylvaniaShow on map |
| Degree of Recognition | International |