Efficient Surface Passivation of Black Silicon Using Spatial ALD

Heikkinen, I. T. S. (Contributor), Repo, P. (Contributor), Vähänissi, V. (Contributor), Pasanen, T. (Contributor), Ville Malinen (Contributor), Emma Salmi (Speaker), Savin, H. (Contributor)

Activity: Talk or presentation typesConference presentation

Period17 Jul 2017
Event titleInternational Conference on Atomic Layer Deposition
Event typeConference
Conference number17
LocationDenver, Colorado, United States
Degree of RecognitionInternational


  • black silicon
  • spatial atomic layer deposition
  • surface passivation
  • aluminum oxide
  • nanostructured silicon