Efficient Surface Passivation of Black Silicon Using Spatial ALD

Activity: Talk or presentation typesConference presentation

Period17 Jul 2017
Event titleInternational Conference on Atomic Layer Deposition
Event typeConference
Conference number17
LocationDenver, Colorado, United StatesShow on map
Degree of RecognitionInternational


  • black silicon
  • spatial atomic layer deposition
  • surface passivation
  • aluminum oxide
  • nanostructured silicon