Doping in silicon affects the blistering of ALD-grown aluminium oxide

Ott, J. (Speaker), Moises Garin (Contributor), Kawa Rosta (Contributor), Pasanen, T. (Contributor), Vähänissi, V. (Contributor), Savin, H. (Contributor)

Activity: Talk or presentation typesConference presentation

Period26 Sep 2019
Event titleConference on Gettering and Defect Engineering in Semiconductor Technology
Event typeConference
Conference number18
LocationZeuthen, Germany
Degree of RecognitionInternational