Dissociation and formation kinetics of iron-boron pairs in silicon after phosphorus implantation gettering
- Nabil Khelifati (Contributor)
- Hannu Laine (Contributor)
- Vähänissi, V. (Contributor)
- Savin, H. (Contributor)
- Fatima Zohra Bouamama (Contributor)
- Djoudi Bouhafs (Contributor)
Activity: Talk or presentation types › Conference presentation