Dissociation and formation kinetics of iron-boron pairs in silicon after phosphorus implantation gettering

  • Nabil Khelifati (Contributor)
  • Hannu Laine (Contributor)
  • Vähänissi, V. (Contributor)
  • Savin, H. (Contributor)
  • Fatima Zohra Bouamama (Contributor)
  • Djoudi Bouhafs (Contributor)

Activity: Talk or presentation typesConference presentation

Period22 Sept 201927 Sept 2019
Event titleConference on Gettering and Defect Engineering in Semiconductor Technology
Event typeConference
Conference number18
LocationZeuthen, GermanyShow on map
Degree of RecognitionInternational