Conformality characterization of Al-doped ZnO films grown by atomic layer deposition on lateral high-aspect-ratio test structures
- Eero Haimi (Speaker)
- Philip, A. (Contributor)
- Velasco Calsina, J. (Contributor)
- Karppinen, M. (Contributor)
- Puurunen, R. (Contributor)
Activity: Talk or presentation types › Conference presentation