Skip to main navigation Skip to search Skip to main content

Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures

  • Jihong Yim (Speaker)

Activity: Talk or presentation types › Conference presentation

Period15 Jul 2019 → 19 Jul 2019
Event titleEurope-Korea Conference on Science and Technology
Event typeConference
LocationVienna, AustriaShow on map
Degree of RecognitionInternational