Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures

Yim, J. (Speaker)

Activity: Talk or presentation typesConference presentation

Period15 Jul 201919 Jul 2019
Event titleEurope-Korea Conference on Science and Technology
Event typeConference
LocationVienna, Austria
Degree of RecognitionInternational