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Characterization of electrically active defefts in CZ-Si by photoluminescence imaging
Savin, H.
(Contributor)
Department of Electronics and Nanoengineering
Electron Physics Group (EPG)
Activity
:
Talk or presentation types
›
Conference presentation
Period
12 Sept 2024
Event title
Conference on Gettering and Defect Engineering in Semiconductor Technology
Event type
Conference
Conference number
2024
Location
Bad Schandau, Germany
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